Patents by Inventor Gordon M. Grivna

Gordon M. Grivna has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160307865
    Abstract: A wire bond system. Implementations may include: a bond wire including copper (Cu), a bond pad including aluminum (Al) and a sacrificial anode electrically coupled with the bond pad, where the sacrificial anode includes one or more elements having a standard electrode potential below a standard electrode potential of Al.
    Type: Application
    Filed: April 5, 2016
    Publication date: October 20, 2016
    Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Wentao QIN, Gordon M. GRIVNA, Harold ANDERSON, Thomas ANDERSON, George CHANG
  • Patent number: 9472458
    Abstract: In one embodiment, semiconductor die are singulated from a semiconductor wafer by placing the semiconductor wafer onto a carrier tape, forming singulation lines through the semiconductor wafer, and reducing the presence of residual contaminates on the semiconductor wafer.
    Type: Grant
    Filed: February 3, 2015
    Date of Patent: October 18, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Jason Michael Doub, Gordon M. Grivna
  • Patent number: 9466708
    Abstract: In one embodiment, a semiconductor device is formed to include a gate structure extending into a semiconductor material that is underlying a first region of semiconductor material. The gate structure includes a conductor and also a gate insulator that has a first portion positioned between the gate conductor and a first portion of the semiconductor material that underlies the gate conductor. The first portion of the semiconductor material is configured to form a channel region of the transistor which underlies the gate conductor. The gate structure may also include a shield conductor overlying the gate conductor and having a shield insulator between the shield conductor and the gate conductor. The shield insulator may also have a second portion positioned between the shield conductor and a second portion of the gate insulator and a third portion overlying the shield conductor.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: October 11, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Balaji Padmanabhan, Prasad Venkatraman, Gordon M. Grivna
  • Patent number: 9466698
    Abstract: An electronic device can include different vertical conductive structures that can be formed at different times. The vertical conductive structures can have the same or different shapes. In an embodiment, an insulating spacer can be used to help electrically insulate a particular vertical conductive structure from another part of the workpiece, and an insulating spacer may not be used to electrically isolate a different vertical conductive structure. The vertical conductive structures can be tailored for particular electrical considerations or to a process flow when formation of other electronic components may also be formed within either or both of the particular vertical conductive structures.
    Type: Grant
    Filed: January 30, 2014
    Date of Patent: October 11, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Gary H. Loechelt, Gordon M. Grivna
  • Publication number: 20160293488
    Abstract: In one embodiment, die are singulated from a wafer having a back layer by placing the wafer onto a carrier substrate with the back layer adjacent the carrier substrate, forming singulation lines through the wafer to expose the back layer within the singulation lines, and applying a pressure substantially uniformly along the second major surface to batch separate the layer of material in the singulation lines. In one embodiment, a fluid filled vessel can be used to apply the pressure.
    Type: Application
    Filed: June 17, 2016
    Publication date: October 6, 2016
    Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventor: Gordon M. Grivna
  • Patent number: 9460995
    Abstract: In one embodiment, a method of forming a HEMT device may include plating a conductor or a plurality of conductors onto an insulator that overlies a plurality of current carrying electrodes of the HEMT device. The method may also include attaching a connector onto the conductor or attaching a plurality of connectors onto the plurality of conductors.
    Type: Grant
    Filed: November 12, 2015
    Date of Patent: October 4, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Ali Salih, Chun-Li Liu, Gordon M. Grivna
  • Publication number: 20160284814
    Abstract: In one embodiment, an IGBT is formed to include a plurality of termination trenches in a termination region of the IGBT. An embodiment may include that one end of one or more termination trenches may be exposed on one surface of the semiconductor device.
    Type: Application
    Filed: June 8, 2016
    Publication date: September 29, 2016
    Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Gordon M. GRIVNA, Ali SALIH
  • Patent number: 9450091
    Abstract: In one embodiment, a vertical insulated-gate field effect transistor includes a feature embedded within a control electrode. The feature is placed within the control electrode to induce stress within predetermined regions of the transistor.
    Type: Grant
    Filed: October 2, 2014
    Date of Patent: September 20, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Gordon M. Grivna, Zia Hossain, Kirk K. Huang, Balaji Padmanabhan, Francine Y. Robb, Prasad Venkatraman
  • Patent number: 9437493
    Abstract: In one embodiment, semiconductor die having non-rectangular shapes and die having various different shapes are formed and singulated from a semiconductor wafer.
    Type: Grant
    Filed: September 10, 2015
    Date of Patent: September 6, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Gordon M. Grivna, Michael J. Seddon
  • Patent number: 9418894
    Abstract: In one embodiment, die are singulated from a wafer having a back layer by placing the wafer onto a carrier substrate with the back layer adjacent the carrier substrate, forming singulation lines through the wafer to expose the back layer within the singulation lines, and applying a pressure substantially uniformly along the second major surface to batch separate the layer of material in the singulation lines. In one embodiment, a fluid filled vessel can be used to apply the pressure.
    Type: Grant
    Filed: March 21, 2014
    Date of Patent: August 16, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventor: Gordon M. Grivna
  • Patent number: 9391135
    Abstract: In one embodiment, an IGBT is formed to include a plurality of termination trenches in a termination region of the IGBT. An embodiment may include that one end of one or more termination trenches may be exposed on one surface of the semiconductor device.
    Type: Grant
    Filed: March 23, 2015
    Date of Patent: July 12, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Gordon M. Grivna, Ali Salih
  • Publication number: 20160172464
    Abstract: In an embodiment, a process of forming an electronic device can include providing a semiconductor substrate having a first major side and an electronic component at least partly within the semiconductor substrate along the first major side; The process can further include thinning the semiconductor substrate to define a second major surface along a second major side opposite the first major side; and selectively removing a portion of the semiconductor substrate along the second major side to define a trench having a distal surface. The process can further include forming a feature adjacent to or within the trench. The feature can include a doped region, a conductive structure, or the like. In another embodiment, an electronic device can include the semiconductor substrate and a conductive structure within a trench. The conductive layer can laterally surround a pillar within the trench.
    Type: Application
    Filed: December 10, 2014
    Publication date: June 16, 2016
    Inventor: Gordon M. Grivna
  • Publication number: 20160172234
    Abstract: In an embodiment, a method of forming a semiconductor may include forming a plurality of active trenches and forming a termination trench substantially surrounding an outer periphery of the plurality of active trenches. The method may also include forming at least one active trench of the plurality of active trenches having corners linking trench ends to sides of active trenches wherein each active trench of the plurality of active trenches has a first profile along the first length and a second profile at or near the trench ends; and forming a termination trench substantially surrounding an outer periphery of the plurality of active trenches and having a second profile wherein one of the first profile or the second profile includes a non-linear shape.
    Type: Application
    Filed: February 19, 2016
    Publication date: June 16, 2016
    Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Gordon M. GRIVNA, Zia HOSSAIN, Ali SALIH
  • Patent number: 9343365
    Abstract: The present invention provides a method for plasma processing a substrate, the method comprising providing a process chamber having a wall; providing a plasma source adjacent to the wall of the process chamber; providing a work piece support within the process chamber; loading a work piece onto the work piece support, the work piece having a support film, a frame and the substrate; providing at least two cutting regions on the substrate, the cutting regions being positioned between all adjacent device structures on the substrate; generating a plasma using the plasma source; and processing the work piece using the generated plasma.
    Type: Grant
    Filed: August 29, 2013
    Date of Patent: May 17, 2016
    Assignee: Plasma-Therm LLC
    Inventors: Thierry Lazerand, David Pays-Volard, Linnell Martinez, Chris Johnson, Russell Westerman, Gordon M. Grivna
  • Patent number: 9343528
    Abstract: An electronic device can include an electronic component and a termination region adjacent to the electronic component region. In an embodiment, the termination region can include an insulating region that extends a depth into a semiconductor layer, wherein the depth is less than 50% of the thickness of the semiconductor layer. In another embodiment, the termination region can include a first insulating region that extends a first depth into the semiconductor layer, and a second insulating region that extends a second depth into the semiconductor layer, wherein the second depth is less than the first depth. In another aspect, a process of forming an electronic device can include patterning a semiconductor layer to define a trench within termination region while another trench is being formed for an electronic component within an electronic component region.
    Type: Grant
    Filed: April 10, 2014
    Date of Patent: May 17, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Jaume Roig Guitart, Zia Hossain, Peter Moens, Gordon M. Grivna
  • Patent number: 9331065
    Abstract: A diode (200) is disclosed having improved efficiency, smaller form factor, and reduced reverse biased leakage current. Schottky diodes (212) are formed on the sidewalls (210) of a mesa region (206). The mesa region (206) is a cathode of the Schottky diode (212). The current path through the mesa region (206) has a lateral and a vertical current path. The diode (200) further comprises a MOS structure (214), p-type regions (220), MOS structures (230), and p-type regions (232). MOS structure (214) with the p-type regions (220) pinch-off the lateral current path under reverse bias conditions. P-type regions (220), MOS structures (230), and p-type regions (232) each pinch-off the vertical current path under reverse bias conditions. MOS structure (214) and MOS structures (230) reduce resistance of the lateral and vertical current path under forward bias conditions. The mesa region (206) can have a uniform or non-uniform doping concentration.
    Type: Grant
    Filed: July 20, 2015
    Date of Patent: May 3, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Gordon M. Grivna, Jefferson W. Hall, Mohammed Tanvir Quddus
  • Publication number: 20160111332
    Abstract: The present invention provides a method for plasma dicing a substrate. The method comprising providing a process chamber having a wall; providing a plasma source adjacent to the wall of the process chamber; providing a work piece support within the process chamber; placing the substrate onto a support film on a frame to form a work piece work piece; loading the work piece onto the work piece support; providing a cover ring disposed above the work piece; generating a plasma through the plasma source; and etching the work piece through the generated plasma.
    Type: Application
    Filed: December 18, 2015
    Publication date: April 21, 2016
    Applicant: Plasma-Therm LLC
    Inventors: Linnell Martinez, David Pays-Volard, Chris Johnson, David Johnson, Russell Westerman, Gordon M. Grivna
  • Patent number: 9306018
    Abstract: A shielding structure for a semiconductor device includes a plurality of trenches. The trenches include passivation liners and shield electrodes, which are formed therein. In one embodiment, the shielding structure is placed beneath a control pad. In another embodiment, the shielding structure is placed beneath a control runner.
    Type: Grant
    Filed: March 17, 2014
    Date of Patent: April 5, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Peter A. Burke, Gordon M. Grivna, Prasad Venkatraman
  • Patent number: 9299776
    Abstract: In an embodiment, a method of forming a semiconductor may include forming a plurality of active trenches and forming a termination trench substantially surrounding an outer periphery of the plurality of active trenches. The method may also include forming at least one active trench of the plurality of active trenches having corners linking trench ends to sides of active trenches wherein each active trench of the plurality of active trenches has a first profile along the first length and a second profile at or near the trench ends; and forming a termination trench substantially surrounding an outer periphery of the plurality of active trenches and having a second profile wherein one of the first profile or the second profile includes a non-linear shape.
    Type: Grant
    Filed: June 5, 2014
    Date of Patent: March 29, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Gordon M. Grivna, Zia Hossain, Ali Salih
  • Patent number: 9299664
    Abstract: In one embodiment, a semiconductor die is formed to have sloped sidewalls. A conductor is formed on the sloped sidewalls.
    Type: Grant
    Filed: January 18, 2010
    Date of Patent: March 29, 2016
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Michael J. Seddon, Francis J. Carney, Gordon M. Grivna