Patents by Inventor Gordon P. Krueger

Gordon P. Krueger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6165328
    Abstract: A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ getter pump disposed within the processing chamber which pumps certain non-noble gases during the flow of the noble gas into the chamber, and a processing mechanism for processing a wafer disposed within the processing chamber. Preferably, the in situ getter pump can be operated at a number of different temperatures to preferentially pump different species of gas at those temperatures. A gas analyzer is used to automatically control the temperature of the getter pump to control the species of gasses that are pumped from the chamber.
    Type: Grant
    Filed: February 28, 1997
    Date of Patent: December 26, 2000
    Assignee: SAES Getters S.p.A.
    Inventors: D'Arcy H. Lorimer, Gordon P. Krueger
  • Patent number: 6142742
    Abstract: A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.
    Type: Grant
    Filed: April 11, 1997
    Date of Patent: November 7, 2000
    Assignee: SAES Pure Gas, Inc.
    Inventors: Gordon P. Krueger, D'Arcy H. Lorimer, Sergio Carella, Andrea Conte
  • Patent number: 6043137
    Abstract: A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.
    Type: Grant
    Filed: January 23, 1997
    Date of Patent: March 28, 2000
    Assignee: SAES Getters S.p.A.
    Inventors: Gordon P. Krueger, D'Arcy H. Lorimer, Sergio Carella, Andrea Conte
  • Patent number: 5997255
    Abstract: A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.
    Type: Grant
    Filed: January 23, 1997
    Date of Patent: December 7, 1999
    Assignee: SAES Getters S.p.A.
    Inventors: Gordon P. Krueger, D'Arcy H. Lorimer, Sergio Carella, Andrea Conte
  • Patent number: 5993165
    Abstract: A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ getter pump disposed within the processing chamber which pumps certain non-noble gases during the flow of the noble gas into the chamber, and a processing mechanism for processing a wafer disposed within the processing chamber. Preferably, the in situ getter pump can be operated at a number of different temperatures to preferentially pump different species of gas at those temperatures. A gas analyzer is used to automatically control the temperature of the getter pump to control the species of gasses that are pumped from the chamber.
    Type: Grant
    Filed: February 28, 1997
    Date of Patent: November 30, 1999
    Assignee: SAES Pure Gas, Inc.
    Inventors: D'arcy H. Lorimer, Gordon P. Krueger
  • Patent number: 5980213
    Abstract: A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.
    Type: Grant
    Filed: January 23, 1997
    Date of Patent: November 9, 1999
    Assignee: SAES Getters S.p.A.
    Inventors: Gordon P. Krueger, D'Arcy H. Lorimer, Sergio Carella, Andrea Conte
  • Patent number: 5972183
    Abstract: A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.
    Type: Grant
    Filed: September 1, 1995
    Date of Patent: October 26, 1999
    Assignee: SAES Getter S.p.A
    Inventors: Gordon P. Krueger, D'Arcy H. Lorimer, Sergio Carella, Andrea Conte
  • Patent number: 5879134
    Abstract: A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ getter pump disposed within the processing chamber which pumps certain non-noble gases during the flow of the noble gas into the chamber, and a processing mechanism for processing a wafer disposed within the processing chamber. Preferably, the in situ getter pump can be operated at a number of different temperatures to preferentially pump different species of gas at those temperatures. A gas analyzer is used to automatically control the temperature of the getter pump to control the species of gasses that are pumped from the chamber.
    Type: Grant
    Filed: February 28, 1997
    Date of Patent: March 9, 1999
    Assignee: SAES Pure Gas, Inc.
    Inventors: D'Arcy H. Lorimer, Gordon P. Krueger
  • Patent number: 5685963
    Abstract: A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ getter pump disposed within the processing chamber which pumps certain non-noble gases during the flow of the noble gas into the chamber, and a processing mechanism for processing a wafer disposed within the processing chamber. Preferably, the in situ getter pump can be operated at a number of different temperatures to preferentially pump different species of gas at those temperatures. A gas analyzer is used to automatically control the temperature of the getter pump to control the species of gasses that are pumped from the chamber.
    Type: Grant
    Filed: October 31, 1994
    Date of Patent: November 11, 1997
    Assignee: SAES Pure Gas, Inc.
    Inventors: D'Arcy H. Lorimer, Gordon P. Krueger
  • Patent number: 5391035
    Abstract: A micro-environment load lock for coupling a SMIF-type box containing a stack of semiconductor wafers directly to a wafer processing chamber includes a load lock chamber in communication with at least one wafer processing tool. The load lock also includes a seal operable to accept and sealably couple a SMIF-type box to the load lock chamber such that SMIF-type box becomes an extension of the load lock chamber, and provides a base that is selectably operable to open and close the SMIF-type box and to selectably draw a cassette of wafers from the SMIF-type box through a port in communication with the load lock chamber and into the load lock chamber. The base is also operable to seal the port in the absence of a SMIF-type box. A single robot is provided in conjunction with the load lock chamber for moving one wafer at a time between the cassette of wafers and the process chamber.
    Type: Grant
    Filed: April 18, 1994
    Date of Patent: February 21, 1995
    Assignee: Applied Materials, Inc.
    Inventor: Gordon P. Krueger
  • Patent number: 5131460
    Abstract: A system for pumping down pressurized gas residing after shut-off in the piping use to provide a gas flow to facilitate backside wafer heating/cooling during the processing of a semiconductor wafer and including a valve selectable secondary piping line for equalizing on shutoff any pressure differential occurring in the primary gas flow line between the process chamber and the backside heating element. The secondary line runs from an opening in the process chamber wall to a tee-joint installed in the primary flow line immediately downstream of the final isolation valve in the primary line. A valve is installed in the secondary line and is operationally interlocked, in an inverse manner, with the isolation valve in the primary line such that when one valve is open the other valve is closed and vice versa.
    Type: Grant
    Filed: October 24, 1991
    Date of Patent: July 21, 1992
    Assignee: Applied Materials, Inc.
    Inventor: Gordon P. Krueger
  • Patent number: 4505371
    Abstract: Apparatus for forming an elongated continuous mat of elongated wood flakes mixed with a binder and adapted to be compressed to form a densified composite wood product for continuously depositing wood flakes on that supporting surface and for aligning the elongated wood flakes being deposited in mutually parallel relation and in alignment with the direction of movement of the supporting surface. A hopper for containing wood flakes deposits wood flakes into the upper end of a fan-shaped flake loader comprised of a plurality of channels positioned in side-by-side relation and sloping downwardly from the hopper to a supporting surface. The channels are generally V-shaped in cross-section and converge toward their lower ends such that the wood flakes deposited in the upper ends of the channels become aligned in mutually parallel relation as the flakes slide down the channels and are deposited on the supporting surface.
    Type: Grant
    Filed: April 5, 1982
    Date of Patent: March 19, 1985
    Assignee: Board of Control of Michigan Technological University
    Inventors: Gordon P. Krueger, Anders E. Lund, Roy D. Adams
  • Patent number: 4505868
    Abstract: An apparatus is provided for forming a continuous loosely felted mat of wood flakes, the wood flakes being elongated and being aligned in mutually parallel relation and parallel to the longitudinal axis of the mat. The apparatus includes a conveyor having an upper surface adapted to support a mat of wood flakes and formers for continuously depositing wood flakes on the conveyor as it moves under the former. Also included are continuous lengths of baffle material positioned between the formers and the conveyor, and oriented so as to define parallel adjacent vertical planes, the planes being parallel to the direction of movement of the upper surface. The lengths of baffle material are positioned in closely spaced side-by-side relation and move with the upper surface beneath the formers as the loosely felted mat is formed and are adapted to cause the flakes to become aligned and to be held in alignment during formation of the mat.
    Type: Grant
    Filed: June 19, 1984
    Date of Patent: March 19, 1985
    Assignee: Board of Control of Michigan Technological University
    Inventors: Gordon P. Krueger, Anders E. Lund, Roy D. Adams
  • Patent number: 4479428
    Abstract: Apparatus are provided for forming a loosely felted mat of elongated wood flakes, the wood flakes being supported on an elongated caul. The flakes are deposited between a plurality of closely spaced parallel baffles so as to be aligned in mutually parallel relation. The caul is supported adjacent the lower edges of the baffles and is support for vertical movement to facilitate buildup of the mat. Apparatus movable back and forth along the length of the caul is provided to deposit wood flakes in an evenly dispursed manner. At least one picker wheel also moves along the length of the baffles, the picker wheel including fingers extending downwardly between baffles and adapted to engage the flakes to cause them to fall between the baffles.
    Type: Grant
    Filed: April 5, 1982
    Date of Patent: October 30, 1984
    Assignee: Board of Control of Michigan Technological University
    Inventors: Gordon P. Krueger, Anders E. Lund, Roy D. Adams
  • Patent number: 4470498
    Abstract: Apparatus for forming an elongated loosely felted mat of thin elongated wood flakes with the flakes being aligned in mutually parallel relation and being aligned with the longitudinal direction of the elongated mat. The apparatus comprises a plurality of conveyor belts positioned in closely adjacent side-by-side relation and defining a mat supporting surface adapted to support the aligned wood flakes, the belts being supported on the surface of a cylinder. Wood flakes are deposited in loosely felted relation on the belts, and a plurality of closely spaced parallel planar baffles surround the cylinder, the baffles comprising plates positioned between the belts and functioning to cause alignment of the flakes as they are deposited on the belts. The mat is compressed against the supporting surface by a plurality of belts positioned in adjacent side-by-side relation, the belts being positionable between the baffles and engageable against the mat.
    Type: Grant
    Filed: April 5, 1982
    Date of Patent: September 11, 1984
    Assignee: Board of Control of Michigan Technological University
    Inventors: Anders E. Lund, Gordon P. Krueger, Bruce A. Haataja, Roy D. Adams
  • Patent number: 4469216
    Abstract: Apparatus for forming a loosely felted mat of thin elongated wood flakes with said flakes being aligned in mutually parallel relation. The apparatus includes a mat supporting surface, a hopper for holding a quantity of wood flakes, and a funnel assembly for receiving wood flakes from the hopper and for causing the flakes to be aligned in substantially parallel side-by-side relation as they are deposited on the supporting surface. The funnel assembly includes a plurality of funnels positioned in adjacent side-by-side relation, the funnels each including inclined walls having lower edges defining an elongated narrow opening adjacent the supporting surface and upper edges defining an opening wider than said narrow opening and for receiving wood flakes from the hopper. The narrow openings of the funnels are parallel and distribute the flakes uniformly across the supporting surface.
    Type: Grant
    Filed: April 5, 8198
    Date of Patent: September 4, 1984
    Assignee: Board of Control of Michigan Technological University
    Inventors: Bruce A. Haataja, Tauno B. Kilpela, Gordon P. Krueger, Roy D. Adams
  • Patent number: 4440287
    Abstract: Apparatus for forming a continuous elongated loosely felted mat of thin elongated wood flakes with the flakes being aligned in mutually parallel interleaved relation. The apparatus includes a plurality of belts positioned in adjacent side-by-side relation and for continuous movement so as to define a supporting surface for the mat. A plurality of sets of thin planar baffle plates are provided, each set including a plurality of thin planar baffle plates supported in coplanar alignment and in edge-to-edge adjacent relation. The baffle plates are positioned between a hopper for depositing wood flakes and the supporting surface and function to align the wood flakes in substantially mutually parallel relation in substantially parallel relation to the direction of movement of the supporting surface and to maintain the wood flakes in substantially parallel alignment as the flakes fall from the hopper onto the supporting surface.
    Type: Grant
    Filed: April 5, 1982
    Date of Patent: April 3, 1984
    Assignee: Board of Control of Michigan Technological University
    Inventors: Anders E. Lund, Gordon P. Krueger, Lynn B. Sandberg
  • Patent number: 4415516
    Abstract: A method and apparatus for forming a loosely felted mat of elongated wood flakes mixed with a binder, the mat including a longitudinal axis and the wood flakes being aligned in mutually parallel relation and parallel to the longitudinal axis of the mat. The wood flakes are held in alignment in the mat by a plurality of closely spaced thin planar baffles, the baffles being comprised of a material which can form an integral part of the mat.
    Type: Grant
    Filed: April 5, 1982
    Date of Patent: November 15, 1983
    Assignee: Board of Control of Michigan Technological University
    Inventors: Gordon P. Krueger, Anders E. Lund
  • Patent number: 4355754
    Abstract: The disclosed invention includes an improved construction of structural members such as railroad crossties, highway spin posts and highway guard posts and to construction of said members from composite wood material including elongated wood flakes and to a method for making such improved structures.
    Type: Grant
    Filed: May 18, 1981
    Date of Patent: October 26, 1982
    Assignee: Board of Control of Michigan Technological University
    Inventors: Anders E. Lund, Gordon P. Krueger
  • Patent number: 4241133
    Abstract: Structural members having strength properties comparable or superior to those of solid wood are made from a composite wood material comprised of elongated wood flakes bonded together with a binder. The grain direction of the flakes extend generally parallel to their longitudinal axis and the flakes are oriented so that the longitudinal axis of at least a majority is generally parallel to the longitudinal axis of the structural member. The structural member is formed as a solid one-piece unit or assembled from two or more structural components which are made from the composite wood material and are joined together in angular relationship with an adhesive.
    Type: Grant
    Filed: April 2, 1979
    Date of Patent: December 23, 1980
    Assignee: Board of Control of Michigan Technological University
    Inventors: Anders E. Lund, Gordon P. Krueger, Darrell D. Nicholas, Roy D. Adams