Patents by Inventor Gordon S. Starkey

Gordon S. Starkey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5496771
    Abstract: Fabrication methods and resultant semiconductor structures wherein stack structures are selectively insulated from an enveloping layer of local interconnect material. The fabrication methods involve forming an overpass insulator(s) simultaneously with the underlying gate. Specifically, a layer of non-erodible insulating material is deposited over a layer of conductive material roughly in the area to comprise the stack structure. A simultaneous etch is then performed, and the resultant insulator portion is self-aligned to the underlying conductive material. The insulator portion insulates the stack from a subsequently deposited and planarized layer of local interconnect. Further processing options include decoupling silicide formation on selected stack structures, and various planarization and etching approaches for different available technologies. Specific details of the fabrication methods and resultant structures are set forth.
    Type: Grant
    Filed: May 19, 1994
    Date of Patent: March 5, 1996
    Assignee: International Business Machines Corporation
    Inventors: John E. Cronin, Carter W. Kaanta, Randy W. Mann, Darrell Meulemans, Gordon S. Starkey