Patents by Inventor Gordon T. McGarvey

Gordon T. McGarvey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for self-aligned MOS patterning
    Patent number: 7153780
    Abstract: A method of forming a thin film stack on a substrate, wherein the thin film stack includes at least a polysilicon layer and an oxide layer; forming a hardmask layer on the thin film stack; forming an anti-reflective coating (ARC) layer on the hardmask layer; patterning the ARC layer; etching the hardmask layer using the patterned ARC layer as a mask; and etching the thin film stack using the hardmask layer as a mask.
    Type: Grant
    Filed: March 24, 2004
    Date of Patent: December 26, 2006
    Assignee: Intel Corporation
    Inventors: Ervin T. Hill, Oleh P. Karpenko, Gordon T. McGarvey, Linda N. Marquez