Patents by Inventor Gouta NIIMI

Gouta NIIMI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11337292
    Abstract: A tin trap device may include a housing including a gas inlet port into which gas containing tin flows from a chamber device, an internal space which communicates with the gas inlet port, and a gas exhaust port which exhausts the gas while communicating with the internal space; a multiple tube including a plurality of tube members, arranged on a flow path of the gas traveling to the gas exhaust port from the gas inlet port through the internal space, and having a temperature at which the tin deposited from the gas adheres to the tube member; and a gas travel direction changing member configured to change a travel direction of at least fastest gas of the gas traveling from the gas inlet port to the multiple tube.
    Type: Grant
    Filed: August 26, 2021
    Date of Patent: May 17, 2022
    Assignee: Gigaphoton Inc.
    Inventors: Gouta Niimi, Georg Soumagne
  • Publication number: 20220141945
    Abstract: A tin trap device may include a housing including a gas inlet port into which gas containing tin flows from a chamber device, an internal space which communicates with the gas inlet port, and a gas exhaust port which exhausts the gas while communicating with the internal space; a multiple tube including a plurality of tube members, arranged on a flow path of the gas traveling to the gas exhaust port from the gas inlet port through the internal space, and having a temperature at which the tin deposited from the gas adheres to the tube member; and a gas travel direction changing member configured to change a travel direction of at least fastest gas of the gas traveling from the gas inlet port to the multiple tube.
    Type: Application
    Filed: August 26, 2021
    Publication date: May 5, 2022
    Applicant: Gigaphoton Inc.
    Inventors: Gouta NIIMI, Georg SOUMAGNE
  • Publication number: 20220082927
    Abstract: An extreme ultraviolet light generation apparatus may include a chamber, a first partition wall covering a plasma generation region in the chamber and having a first opening, an EUV light concentrating mirror located in a first space inside the chamber and outside the first partition wall and configured to concentrate extreme ultraviolet light generated in the plasma generation region and having passed through the first opening, a first gas supply port formed at the chamber and configured to supply gas to the first space, and a gas exhaust port formed in the first partition wall and configured to exhaust gas in a second space inside the first partition wall to outside of both the first partition wall and the chamber.
    Type: Application
    Filed: August 9, 2021
    Publication date: March 17, 2022
    Applicant: Gigaphoton Inc.
    Inventors: Yusuke HOSHINO, Yukio WATANABE, Toshihiro NISHISAKA, Atsushi UEDA, Koichiro KOGE, Takayuki OSANAI, Gouta NIIMI