Patents by Inventor GRACE SEMICONDUCTOR MANUFACTURING C

GRACE SEMICONDUCTOR MANUFACTURING C has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20130082326
    Abstract: A superjunction LDMOS and its manufacturing method are disclosed. The superjunction LDMOS includes a diffused well in which a superjunction structure is formed; the superjunction structure has a depth less than the depth of the diffused well. The manufacturing method includes: provide a semiconductor substrate; form a diffused well in the semiconductor substrate by photolithography and high temperature diffusion; form an STI layer above the diffused well; form a superjunction structure in the diffused well by ion implantation, wherein the superjunction structure has a depth less than the depth of the diffused well; and form the other components of the superjunction LDMOS by subsequent conventional CMOS processes. The method is compatible with conventional CMOS processes and do not require high-cost and complicated special processes.
    Type: Application
    Filed: September 28, 2012
    Publication date: April 4, 2013
    Applicant: GRACE SEMICONDUCTOR MANUFACTURING CORPORATION
    Inventor: GRACE SEMICONDUCTOR MANUFACTURING C