Abstract: A method for designing a sensor using a dual double-ended tuning forks which provides composite cancellation of second-order non-linearity terms.

Abstract: A resonator beam structure that, during vibration of the tines, minimizes coupling of a longitudinal motion of the tines into a support structure to which the resonator beam is attached. The resonator beam includes a pair of tines; a first base region mechanically coupling a first ends of the tines together; a second base region mechanically coupling the second ends of the tines together; a first cutout of a first predetermined geometry at a first predetermined position in a closed interior portion of the first base region; and a second cutout of a second predetermined geometry at a second predetermined position in a closed interior portion of the second base region. The invention includes a method for using finite element analysis to determine an optimum geometry and position of the cutouts.

Abstract: A resonator beam structure that, during vibration of the tines, minimizes coupling of a longitudinal motion of the tines into a support structure to which the resonator beam is attached. The resonator beam includes a pair of tines; a first base region mechanically coupling a first ends of the tines together; a second base region mechanically coupling the second ends of the tines together; a first cutout of a first predetermined geometry at a first predetermined position in a closed interior portion of the first base region; and a second cutout of a second predetermined geometry at a second predetermined position in a closed interior portion of the second base region. The invention includes a method for using finite element analysis to determine an optimum geometry and position of the cutouts.

Abstract: A method for designing a sensor using a dual double-ended tuning forks which provides composite cancellation of second-order non-linearity terms.

Abstract: The present invention provides an acceleration sensor and an accelerometer having isolation structure formed using a bulk straight wall deep reactive ion etch process, whereby external stress sources are isolated from active accelerometer components.

Abstract: A vibrating crystal transducer for measuring temperature including a bonding area from which three or more tines extend. The tines have a torsional mode resonant frequency that is a function of temperature. Electrodes on the transducer excite the tines into vibration so that the torsional moments of the adjacent edges of the adjacent tines are reverse symmetric. When the tines are vibrated, the reverse symmetrical vibrational moments of the individual tines cancel so that there is no torsional moment, or twisting, within the area between the points where the tines intersect, which is the area defined by the bonding area. Since the bonding area does not serve as a sink for torsional energy, torsional energy is not lost through the bonding area so that the transducer has a relatively high quality factor and torsional vibration of the transducer cannot cause the transducer to eventually work loose of a mounting pad to which it is attached.

Abstract: An improved accelerometer of the type that includes a proof mass suspended from a support by one or more flexures, such that the proof mass can pivot with respect to the support about a hinge axis. The proof mass includes a paddle attached to the flexures, the paddle having first and second paddle surfaces. The coil is mounted on the first paddle surface, and the accelerometer includes a stator for mounting the support and for forming a magnetic circuit with the coil. The improvement comprises positioning the flexures such that a plane containing the hinge axis and the center of mass of the proof mass is parallel to one of the paddle surfaces, and closer to one paddle surface than to the other paddle surface. In a preferred arrangement, the plane containing the hinge axis and the center of mass is approximately coplanar with one of the paddle surfaces and with the flexures.

Abstract: A dual vibrating beam force transducer having an electrostatic drive system. The transducer comprises a body having first and second generally parallel beams, coupled together at their ends. First and second electrodes are positioned adjacent to but not in contact with the respective beams. A drive circuit causes an oscillating voltage to be applied to the electrodes. The beams are thus subjected to electrostatic forces that cause the beams to oscillate in a vibration plane containing both beams. The mechanical resonance of the beams controls the oscillation frequency, such that the frequency is a function of a force exerted along the beams. An embodiment is also described in which the drive means is coupled directly to one of the beams.