Patents by Inventor Graeme Morland

Graeme Morland has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of removing photo resist
    Patent number: 5496438
    Abstract: A method of removing photoresist (20) from a metal layer (16) formed on a substrate (1) and having a pattern defined by means of a corrosive gas plasma etch. The method consists of etching the resist (20) in an oxygen gas plasma for a period of time and at a sufficiently high temperature to remove all residual corrosive gas absorbed in the photoresist and below the temperature at which the metal beings to flow. An etching time of 3 minutes at 300.degree. C. is typically used.
    Type: Grant
    Filed: December 9, 1994
    Date of Patent: March 5, 1996
    Assignee: Motorola, Inc.
    Inventors: Phil Wootton, Graeme Morland, Karl E. Mautz, John Dalziel