Abstract: A method and apparatus for comparing fuel sources to assess the suitability of a fuel for use in a fuel cell. The apparatus comprising an electrochemical sensor comprising a fuel flow channel configured to receive a plurality of input fuels at a plurality of locations along the fuel flow channel. The fuel flow channel configured to supply the plurality of input fuels to an anode of the electrochemical sensor and an electrolyte configured to transmit ionised input fuels from the anode to a cathode of the electrochemical sensor. A control system connected to the electrochemical sensor where the anode and/or the cathode is divided into a plurality of segments and the control system is configured to measure the current in each of the plurality of segments and determine the current density of each of the plurality of segments.

Abstract: An arrangement for installing and sealing an anode within a fluorine generating electrolytic cell is described, the arrangement comprising: an anode connection member, said anode connection member (32) passing through an aperture (70) in a skirt wall (20) and being in electrical connection with a skirt wall closure member (72) wherein the skirt wall closure member is sealingly engaged with said skirt wall and is electrically insulated therefrom.

Abstract: In a method of delivering high purity fluorine to a processing system, an on-site fluorine generator supplies high purity fluorine to a fixed storage tank, from which the high purity fluorine is supplied to the processing system. To provide a back up to the fluorine generator, high purity fluorine is also provided in a transportable gas storage vessel, for example, a multi-cylinder pack at a relatively low pressure, typically less than 35 psig. The transportable storage vessel is selectively connected to the fixed storage tank as required to enable the amount of fluorine within the storage tank to be maintained at a desired level.

Abstract: In a method of delivering high purity fluorine to a processing system, an on-site fluorine generator supplies high purity fluorine to a fixed storage tank, from which the high purity fluorine is supplied to the processing system. To provide a back up to the fluorine generator, high purity fluorine is also provided in a transportable gas storage vessel, for example, a multi-cylinder pack at a relatively low pressure, typically less than 35 psig. The transportable storage vessel is selectively connected to the fixed storage tank as required to enable the amount of fluorine within the storage tank to be maintained at a desired level.

Abstract: An arrangement for installing and sealing an anode within a fluorine generating electrolytic cell is described, the arrangement comprising: an anode connection member, said anode connection member (32) passing through an aperture (70) in a skirt wall (20) and being in electrical connection with a skirt wall closure member (72) wherein the skirt wall closure member is sealingly engaged with said skirt wall and is electrically insulated therefrom.

Abstract: Apparatus and a method for the generation of fluorine by the electrolysis of hydrogen fluoride are described. The apparatus comprises: a plurality of individual fluorine generating cassettes; said individual fluorine generating cassettes being operably connected to a fluorine gas distribution system for the remote use and consumption of said fluorine gas; said fluorine generating cassettes being individually isolatable from said gas distribution system and removable from the apparatus for remote maintenance.

Abstract: A ClF3 gas generation system is provided with supply sources of chlorine (3) (for example a cylinder of compressed chlorine) and fluorine (4) (for example a fluorine generator) connected into a gas reaction chamber (2) enabling generation of ClF3 gas. The reaction chamber has a valved outlet (C) for the supply of the ClF3 gas to a process chamber for immediate local use.

Abstract: A method and system for thermally activating a oxidizing cleaning gas for use in a semiconductor process chamber cleaning process. The oxidizing cleaning gas is thermally activated by reacting the oxidizing cleaning gas with heated inert gas. The resulting thermally activated oxidizing cleaning gas does not readily deactivate, thus providing enhanced cleaning capabilities.

Abstract: A method and system for thermally activating a oxidizing cleaning gas for use in a semiconductor process chamber cleaning process. The oxidizing cleaning gas is thermally activated by reacting the oxidizing cleaning gas with heated inert gas. The resulting thermally activated oxidizing cleaning gas does not readily deactivate, thus providing enhanced cleaning capabilities.

Abstract: The present invention is directed to a process and system for the versatile operation of process equipment, and especially semiconductor process chamber clean equipment, from any pressure level ranging from a vacuum to just less than one atmosphere absolute. The system of the present invention provides a storage vessel capable of storing gas at sub-atmospheric pressure and a vacuum pump. By using a vacuum pump, the vessel stores a reasonable quantity of gas without being pressurized above atmospheric pressure. Therefore, the entire capacity of the vessel can be supplied to the process because the vacuum pump pulls the contents from the vessel down to about 1 torr. In addition, the gas can be provided at a constant supply pressure, while providing a safe gas storage vessel, since the supply gas is never stored at a pressure above one atmosphere absolute.

Abstract: A process for the treatment of a hydrated mixture of a salt which comprises an inorganic fluoride and hydrogen fluoride to remove water from the mixture wherein the salt mixture contains an excess of hydrogen fluoride, which process comprises forming a liquid phase of the said mixture by melting the salt therein and feeding an inert gas through the liquid phase of the mixture.

Abstract: An on-demand fluorine cell is described together with the construction of a suitable anode and a means of mounting the anode within the cell. The fluorine cell comprises a cell container having a cathode compartment and an anode compartment, the anode compartment having an anode therein, the cathode compartment and the anode compartment having separation means therebetween so as to separate fluorine gas and hydrogen gas generated during operation of said fluorine cell but said separation means allowing passage of electrolyte between said compartments; said anode extending below a lower end of the separation means and being continuously in contact with the electrolyte, control sensor means in at least one of said compartments to sense the level of electrolyte in said at least one compartment; electric current supply means responsive to signals from said control sensor means so as to either start or stop current supply in accordance with said signals.

Abstract: A process and an electrolytic cell for the production of fluorine. A fluorine-containing electrolyte is passed in non-turbulent flow between an anode and a cathode of the electrolytic cell. The electrolyte emerging from between the anode and the cathode is divided into two streams. One stream emerges adjacent to the anode and has fluorine entrained therein, the other stream emerges adjacent to the cathode and has hydrogen entrained therein. The fluorine and the hydrogen are subsequently separated from their respective streams of electrolyte.

Abstract: In a method of producing uranium (IV) fluoride, a feedstock comprising uranium metal or alloy is dissolved in hydrochloric acid and hydrofluoric acid to produce a clear solution. The solution is heated and excess hydrofluoric acid added to produce a precipitate comprising uranium (IV) fluoride.

Abstract: Ceramic uranium dioxide is produced from uranium metal by steam oxidation of the metal, followed by oxidation in air to produce U.sub.3 O.sub.8, and subsequent reduction in hydrogen of the U.sub.3 O.sub.8 to produce UO.sub.2. The steam environment may be between 250.degree. C. and 500.degree. C., the oxygen-containing environment at 700.degree. C. or below, and the reducing environment at 600.degree. C. or below.