Patents by Inventor Graham Richard Powell

Graham Richard Powell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of etching a substrate
    Patent number: 6649527
    Abstract: This invention relates to a method of etching a substrate in a chamber on an electrostatic chuck, which defines a gas cooling path at the substrate/chuck interface. The method includes electrostatically clamping the substrate on the chuck with gas in the gas path being at a first pressure; etching the substrate at a first power; detecting the end point for the etc; reducing the gas pressure to a second pressure at which the substrate floats on a gas; and over etching the wafer at a second power, which is lower than the first power.
    Type: Grant
    Filed: March 27, 2002
    Date of Patent: November 18, 2003
    Assignee: Trikon Holdings Limited
    Inventors: Mark Puttock, Graham Richard Powell, Kevin Powell, David Andrew Tossell, Matthew Peter Martin
  • Method of etching a substrate
    Publication number: 20020142608
    Abstract: This invention relates to a method of etching a substrate in a chamber on an electrostatic chuck, which defines a gas cooling path at the substrate/chuck interface. The method includes electrostatically clamping the substrate on the chuck with gas in the gas path being at a first pressure; etching the substrate at a first power; detecting the end point for the etc; reducing the gas pressure to a second pressure at which the substrate floats on a gas; and over etching the wafer at a second power, which is lower than the first power.
    Type: Application
    Filed: March 27, 2002
    Publication date: October 3, 2002
    Inventors: Mark Puttock, Graham Richard Powell, Kevin Powell, David Andrew Tossell, Matthew Peter Martin