Abstract: A sensing system that provides an isolation diaphragm through which pressure is transmitted from a process fluid to a fill fluid contained within the sensing system's body is provided. In the system, fill fluid transfers pressure to semiconductor sensors that provide signals for both the differential pressure and the static pressure, thereby allowing for signal conditioning of the differential output to compensate for the effects of static pressure. The system's body provides a cavity for fill fluid behind each of the isolation diaphragms. At least one flat plate actuation diaphragm allows controlled movement of oil as the differential pressure of the isolation diaphragm increases. Fluid volumes are managed for thermal effects, passive thermal volume change; compensation is accomplish by offsetting the large coefficient of thermal expansion (CTE) of fill fluid by providing at least one insert whose coefficient of thermal expansion is smaller than the CTE of the system body.

Abstract: A sensing system that provides an isolation diaphragm through which pressure is transmitted from a process fluid to a fill fluid contained within the sensing system's body is provided. In the system, fill fluid transfers pressure to semiconductor sensors that provide signals for both the differential pressure and the static pressure, thereby allowing for signal conditioning of the differential output to compensate for the effects of static pressure. The system's body provides a cavity for fill fluid behind each of the isolation diaphragms. At least one flat plate actuation diaphragm allows controlled movement of oil as the differential pressure of the isolation diaphragm increases. Fluid volumes are managed for thermal effects, passive thermal volume change; compensation is accomplish by offsetting the large coefficient of thermal expansion (CTE) of fill fluid by providing at least one insert whose coefficient of thermal expansion is smaller than the CTE of the system body.

Abstract: A pressure sensing system and method includes a pressure sensor configured to include a pressure sensing diaphragm and a pressure port. A memory circuit incorporated can be incorporated into the pressure port. A high order polynomial component can also be provided. One or more excitation signals are then applicable to the pressure sensor such that a voltage output thereof is measured and recorded at a plurality of predefined temperatures and pressures in order to generate pressure sensor output data. Such output data is then automatically input to the high order polynomial component in order to generate a set of correction coefficients usable for improving the accuracy of the pressure sensor. The pressure sensing diaphragm is preferably based on an Advanced Thick Film (ATF) configuration.