Patents by Inventor GRANT BALDWIN

GRANT BALDWIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system of monitoring and controlling deformation of a wafer substrate
    Patent number: 10431436
    Abstract: A method and system are for monitoring and controlling deformation of a wafer substrate during a plasma etching of the wafer substrate. The method includes disposing a wafer substrate on a platen assembly within a process chamber so that an entire upper surface of the wafer is exposed, passing a process gas into the process chamber, applying a radio frequency bias voltage to the platen assembly, generating a plasma within the process chamber, monitoring a voltage difference between the platen assembly and the process chamber, during the etch process, and attenuating or extinguishing the plasma to prevent further etching once a threshold monitored voltage is reached.
    Type: Grant
    Filed: August 30, 2017
    Date of Patent: October 1, 2019
    Assignee: SPTS TECHNOLOGIES LIMITED
    Inventors: Huma Ashraf, Kevin Riddell, Roland Mumford, Grant Baldwin
  • METHOD AND SYSTEM OF MONITORING AND CONTROLLING DEFORMATION OF A WAFER SUBSTRATE
    Publication number: 20180144911
    Abstract: A method and system are for monitoring and controlling deformation of a wafer substrate during a plasma etching of the wafer substrate. The method includes disposing a wafer substrate on a platen assembly within a process chamber so that an entire upper surface of the wafer is exposed, passing a process gas into the process chamber, applying a radio frequency bias voltage to the platen assembly, generating a plasma within the process chamber, monitoring a voltage difference between the platen assembly and the process chamber, during the etch process, and attenuating or extinguishing the plasma to prevent further etching once a threshold monitored voltage is reached.
    Type: Application
    Filed: August 30, 2017
    Publication date: May 24, 2018
    Inventors: HUMA ASHRAF, KEVIN RIDDELL, ROLAND MUMFORD, GRANT BALDWIN
  • Trash bag holder
    Patent number: D252011
    Type: Grant
    Filed: May 18, 1977
    Date of Patent: June 5, 1979
    Assignee: J. Grant Baldwin, Jr.
    Inventors: Vernon D. Permann, J. Grant Baldwin, Jr.