Patents by Inventor Greg A. Blackburn
Greg A. Blackburn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10770321Abstract: Embodiments of the present disclosure provide a method, system, and computer program product for monitoring a service life of a chamber component. In one example, the method includes receiving one or more power measurements of a semiconductor processing chamber from one or more sensors positioned about the semiconductor processing chamber. The processor compares the one or more power measurements to one or more threshold values corresponding to the service life of the chamber component. The processor determines whether the one or more power measurements exceed the threshold values. If the processor determines that the one or more power measurements exceed the threshold values, the processor takes remedial measures for the service life of the chamber component.Type: GrantFiled: January 4, 2019Date of Patent: September 8, 2020Assignee: Applied Materials, Inc.Inventors: Kang-Lie Chiang, Greg A. Blackburn, Pallavi Zhang, Michael D. Armacost, Nitin Khurana
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Publication number: 20190148194Abstract: Embodiments of the present disclosure provide a method, system, and computer program product for monitoring a service life of a chamber component. In one example, the method includes receiving one or more power measurements of a semiconductor processing chamber from one or more sensors positioned about the semiconductor processing chamber. The processor compares the one or more power measurements to one or more threshold values corresponding to the service life of the chamber component. The processor determines whether the one or more power measurements exceed the threshold values. If the processor determines that the one or more power measurements exceed the threshold values, the processor takes remedial measures for the service life of the chamber component.Type: ApplicationFiled: January 4, 2019Publication date: May 16, 2019Inventors: Kang-Lie CHIANG, Greg A. BLACKBURN, Pallavi ZHANG, Michael D. ARMACOST, Nitin KHURANA
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Patent number: 10177018Abstract: Embodiments of the present disclosure provide a method, system, and computer program product for monitoring a service life of a chamber component. In one example, the method includes receiving one or more power measurements of a semiconductor processing chamber from one or more sensors positioned about the semiconductor processing chamber. The processor compares the one or more power measurements to one or more threshold values corresponding to the service life of the chamber component. The processor determines whether the one or more power measurements exceed the threshold values. If the processor determines that the one or more power measurements exceed the threshold values, the processor takes remedial measures for the service life of the chamber component.Type: GrantFiled: August 10, 2017Date of Patent: January 8, 2019Assignee: Applied Materials, Inc.Inventors: Kang-Lie Chiang, Greg A. Blackburn, Pallavi Zhang, Michael D. Armacost, Nitin Khurana
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Publication number: 20180047599Abstract: Embodiments of the present disclosure provide a method, system, and computer program product for monitoring a service life of a chamber component. In one example, the method includes receiving one or more power measurements of a semiconductor processing chamber from one or more sensors positioned about the semiconductor processing chamber. The processor compares the one or more power measurements to one or more threshold values corresponding to the service life of the chamber component. The processor determines whether the one or more power measurements exceed the threshold values. If the processor determines that the one or more power measurements exceed the threshold values, the processor takes remedial measures for the service life of the chamber component.Type: ApplicationFiled: August 10, 2017Publication date: February 15, 2018Inventors: Kang-Lie CHIANG, Greg A. BLACKBURN, Pallavi ZHANG, Michael D. ARMACOST, Nitin KHURANA
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Patent number: 5716484Abstract: A plasma etch chamber includes a modified focus ring which is used in conjunction with chamber pressure throttling to eject contaminants in the focus ring away from the substrate just before the etching cycle is completed. Additionally, process gas is directed against the inner wall of the chamber to create a swirling flow of plasma within the chamber and thus disturb any contaminant-generating field adjacent the chamber wall. A process gas, or a non-reactive purge gas, may also be supplied from a diffuser atop the cathode, to direct a gas layer along the top and sides of the chamber to reduce contaminant build-up on the chamber surfaces.Type: GrantFiled: May 11, 1995Date of Patent: February 10, 1998Assignee: Applied Materials, Inc.Inventors: Greg Blackburn, Joseph Kava, Richard McGovern, Yan Rozenzon
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Patent number: 5693179Abstract: A plasma etch chamber includes a modified focus ring which is used in conjunction with chamber pressure throttling to eject contaminants in the focus ring away from the substrate just before the etching cycle is completed. Additionally, process gas is directed against the inner wall of the chamber to create a swirling flow of plasma within the chamber and thus disturb any contaminant-generating field adjacent the chamber wall. A process gas, or a non-reactive purge gas, may also be supplied from a diffuser atop the cathode, to direct a gas layer along the top and sides of the chamber to reduce contaminant build-up on the chamber surfaces.Type: GrantFiled: June 2, 1995Date of Patent: December 2, 1997Assignee: Applied Materials, Inc.Inventors: Greg Blackburn, Joseph Kava, Richard McGovern, Yan Rozenzon
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Patent number: 5484486Abstract: This invention is directed to a novel assembly of replaceable parts for use in a substrate processing apparatus. Covers for the substrate processing surface are attached in a plurality of pieces as opposed to a solid piece, for removeability without removing the wafer support pedestals. A ring for surrounding the pedestal includes a fastener enabling the ring to snap in place onto the pedestal. A focus ring for surrounding the pedestal ring attaches to the pedestal ring via a snug fit into a built-in grooved series of notches in the pedestal ring. A novel fastener that enables two articles to snap together is disclosed.Type: GrantFiled: May 2, 1994Date of Patent: January 16, 1996Assignee: Applied Materials, Inc.Inventors: Greg Blackburn, Donald L. Johnson, Richard McGovern, Yan Rozenzon
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Patent number: 5480052Abstract: A domed dielectric extension is set atop a standard electrode in a bell jar shaped process chamber to decrease electrical interaction between the electrode and the process chamber and thereby decrease the stagnant plasma in the region between the electrode and the process chamber lid that promotes polymer deposition upon the inner surface of a process chamber lid. The extension, made of a process inert dielectric material such as polycarbonate, has an upper surface that is curved to conform to the shape of the inner surface of the process chamber lid and that is precisely spaced from the upper portion of the process chamber lid inner surface.Type: GrantFiled: October 22, 1993Date of Patent: January 2, 1996Assignee: Applied Materials, Inc.Inventors: Michael G. Furr, Joseph Kava, Greg Blackburn, Richard McGovern
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Patent number: 5474649Abstract: The invention is directed to a focus ring for surrounding a workpiece/surface substrate during plasma processing comprising a hollow annular assembly comprised of electrically insulating material and having a texturized surface. The texturized ring is preferably in the geometry of a generally cylindrical structure. The texturizing of the ring can be effected by any means of surface abrasion including bead blasting or chemical etching.Type: GrantFiled: March 8, 1994Date of Patent: December 12, 1995Assignee: Applied Materials, Inc.Inventors: Joseph Kava, Richard J. McGovern, Greg A. Blackburn