Patents by Inventor Greg Barbour

Greg Barbour has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • In situ feature height measurement
    Patent number: 6976901
    Abstract: Embodiments of the invention provide methods and apparatus for in situ feature height measurement of an object being planarized. In one embodiment, a method of planarizing an object comprises polishing a surface of the object to be planarized using a polishing pad having a cavity; and directing an incident light from the cavity of the polishing pad to optically measure feature heights of surface features on the surface of the object to obtain measurement data during the polishing of the surface using the polishing pad. The feature heights are relative height differences of the features measured by directing the incident light at the surface of the object from the cavity and observing a reflected light intensity of a reflected light from the features on the surface to the cavity.
    Type: Grant
    Filed: October 7, 2003
    Date of Patent: December 20, 2005
    Assignee: Strasbaugh
    Inventors: David G. Halley, Greg Barbour
  • Polishing pad sensor assembly with a damping pad
    Patent number: 6884150
    Abstract: A polishing pad having an optical assembly that does not cause excess wear on a wafer workpiece. The optical assembly is disposed within the pad such that it may move in response to forces applied to the optical assembly. A damping pad may be disposed on the optical assembly to reduce vibrations and further increase the sensitivity of optical measurements.
    Type: Grant
    Filed: August 8, 2002
    Date of Patent: April 26, 2005
    Assignee: Strasbaugh
    Inventor: Greg Barbour
  • Polishing pad with optical sensor
    Patent number: 6726528
    Abstract: A polishing pad having an optical assembly that does not cause excess wear on a wafer workpiece. The optical assembly is disposed within the pad such that it may move in response to forces applied to the optical assembly.
    Type: Grant
    Filed: May 14, 2002
    Date of Patent: April 27, 2004
    Assignee: Strasbaugh
    Inventor: Greg Barbour
  • Polishing pad with optical sensor
    Publication number: 20030216107
    Abstract: A polishing pad having an optical assembly that does not cause excess wear on a wafer workpiece. The optical assembly is disposed within the pad such that it may move in response to forces applied to the optical assembly.
    Type: Application
    Filed: May 14, 2002
    Publication date: November 20, 2003
    Applicant: Strasbaugh, Inc.
    Inventor: Greg Barbour
  • Polishing pad sensor assembly with a damping pad
    Publication number: 20030216108
    Abstract: A polishing pad having an optical assembly that does not cause excess wear on a wafer workpiece. The optical assembly is disposed within the pad such that it may move in response to forces applied to the optical assembly. A damping pad may be disposed on the optical assembly to reduce vibrations and further increase the sensitivity of optical measurements.
    Type: Application
    Filed: August 8, 2002
    Publication date: November 20, 2003
    Inventor: Greg Barbour
  • Bubble hockey game
    Patent number: D876563
    Type: Grant
    Filed: May 23, 2017
    Date of Patent: February 25, 2020
    Assignee: Molson Canada 2005
    Inventors: Brian Collins, Greg Barbour, Richard Kuypers, Andrew Singleton