Patents by Inventor Greg Book

Greg Book has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DUAL DAMASCENE INTEGRATION STRUCTURES AND METHOD OF FORMING IMPROVED DUAL DAMASCENE INTEGRATION STRUCTURES
    Publication number: 20090130861
    Abstract: Methods of densifying a porous ultra-low-k (ULK) dielectric material by using gas-cluster ion-beam processing are disclosed. Methods for gas-cluster ion-beam etching, densification, pore sealing and ashing are described that allow simultaneous removal of material and densification of the ULK interfaces. A novel ULK dual damascene structure is disclosed with densified interfaces and no hard-masks.
    Type: Application
    Filed: October 6, 2008
    Publication date: May 21, 2009
    Applicant: TEL EPION INC.
    Inventors: John J. Hautala, Greg Book
  • Dual damascene integration structure and method for forming improved dual damascene integration structure
    Publication number: 20050272237
    Abstract: Methods of densifying a porous ultra-low-k (ULK) dielectric material by using gas-cluster ion-beam processing are disclosed. Methods for gas-cluster ion-beam etching, densification, pore sealing and ashing are described that allow simultaneous removal of material and densification of the ULK interfaces. A novel ULK dual damascene structure is disclosed with densified interfaces and no hard-masks.
    Type: Application
    Filed: June 2, 2005
    Publication date: December 8, 2005
    Applicant: Epion Corporation
    Inventors: John Hautala, Greg Book