Patents by Inventor Greg Farhner

Greg Farhner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for plasma-based deposition
    Patent number: 8962101
    Abstract: High-deposition rate methods for forming transparent ashable hardmasks (AHMs) that have high plasma etch selectivity to underlying layers are provided. The methods involve placing a wafer on a powered electrode such as a powered pedestal for plasma-enhanced deposition. According to various embodiments, the deposition is run at low hydrocarbon precursor partial pressures and/or low process temperatures. Also provided are ceramic wafer pedestals with multiple electrode planes embedded with the pedestal are provided. According to various embodiments, the pedestals have multiple RF mesh electrode planes that are connected together such that all the electrode planes are at the same potential.
    Type: Grant
    Filed: August 23, 2013
    Date of Patent: February 24, 2015
    Assignee: Novellus Systems, Inc.
    Inventors: Pramod Subramonium, Aaron Bingham, Tim Thomas, Jon Henri, Greg Farhner
  • METHODS AND APPARATUS FOR PLASMA-BASED DEPOSITION
    Publication number: 20140057454
    Abstract: High-deposition rate methods for forming transparent ashable hardmasks (AHMs) that have high plasma etch selectivity to underlying layers are provided. The methods involve placing a wafer on a powered electrode such as a powered pedestal for plasma-enhanced deposition. According to various embodiments, the deposition is run at low hydrocarbon precursor partial pressures and/or low process temperatures. Also provided are ceramic wafer pedestals with multiple electrode planes embedded with the pedestal are provided. According to various embodiments, the pedestals have multiple RF mesh electrode planes that are connected together such that all the electrode planes are at the same potential.
    Type: Application
    Filed: August 23, 2013
    Publication date: February 27, 2014
    Applicant: Novellus Systems, Inc.
    Inventors: Pramod Subramonium, Aaron Bingham, Tim Thomas, Jon Henri, Greg Farhner