Patents by Inventor Greg Goldspring

Greg Goldspring has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for etching a gold metal layer using a titanium hardmask
    Patent number: 6554952
    Abstract: Disclosed is an inventive method for etching a gold metallization in a plasma processing chamber. The method includes introducing a substrate having a gold layer and an overlying titanium hardmask layer into the plasma processing chamber. The hardmask is first etched using conventional etching techniques. Then a plasma is formed in the chamber from an oxidizing gas and an etching gas. The etching gas is preferably a hydrochloric acid containing gas which may contain a chlorine containing gas. In addition, N2 may be provided. The plasma is then used to etch the gold layer through the titanium hardmask.
    Type: Grant
    Filed: September 14, 2001
    Date of Patent: April 29, 2003
    Assignee: Lam Research Corporation
    Inventors: Gladys So-Wan Lo, David W. Mytton, Greg Goldspring