Patents by Inventor Greg STUMBO

Greg STUMBO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for masking solar cell substrates for deposition
    Patent number: 8677929
    Abstract: Disclosed are methods and apparatus for masking of substrates for deposition, and subsequent lifting of the mask with deposited material. Masking materials are utilized that can be used in high temperatures and vacuum environment. The masking material has minimal outgassing once inside a vacuum chamber and withstand the temperatures during deposition process. The mask is inkjeted over the wafers and, after deposition, removed using agitation, such as ultrasonic agitation, or using laser burn off.
    Type: Grant
    Filed: December 27, 2011
    Date of Patent: March 25, 2014
    Assignee: Intevac, Inc.
    Inventors: Alexander J. Berger, Terry Bluck, Vinay Shah, Judy Huang, Karthik Janakiraman, Chau T. Nguyen, Greg Stumbo
  • METHOD AND APPARATUS FOR MASKING SUBSTRATES FOR DEPOSITION
    Publication number: 20120171807
    Abstract: Disclosed are methods and apparatus for masking of substrates for deposition, and subsequent lifting of the mask with deposited material. Masking materials are utilized that can be used in high temperatures and vacuum environment. The masking material has minimal outgassing once inside a vacuum chamber and withstand the temperatures during deposition process. The mask is inkjeted over the wafers and, after deposition, removed using agitation, such as ultrasonic agitation, or using laser burn off.
    Type: Application
    Filed: December 27, 2011
    Publication date: July 5, 2012
    Inventors: Alexander J. BERGER, Terry BLUCK, Vinay SHAH, Judy HUANG, Karthik JANAKIRAMAN, Chau T. NGUYEN, Greg STUMBO