Abstract: A sensing system determines movement and position of passengers and objects within a vehicle. In particular, the determination of the position and movement of body parts can be enhanced by providing features that provide a source of ground for the system. The sensing system is able to transmit a plurality of signals during a transmission period and use the sensed signals during a frame in order to create different heat maps that represent movement and position of person during an integration period. By taking advantage of grounding sources, the system is able to better determine the position and movement of a person or object.

Abstract: A semiconductor substrate processing method and apparatus, more specifically, a method and apparatus for polishing a substrate or semiconductor wafer in a polishing system. In one embodiment, the system includes one or more polishing modules, an input module, a first robot and a second robot that provides a compact polishing system that has a minimal tool footprint. The first robot is adapted to transfer the substrate to the input module, while the second robot is adapted to transfer the substrate between the input module and the one or more polishing modules. In another embodiment, the first and second robots have rotary actuators coupled to their grippers that enable the substrate to be orientated between a horizontal and vertical position. The input module is adapted to maintain the substrate in a vertical orientation. The vertical orientation of the substrates facilitates integration of a cleaning system that cleans the substrates while in the vertical orientation.