Patents by Inventor Greggory SCRANTON

Greggory SCRANTON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS FOR GENERATING CHARACTERISTIC PATTERN AND TRAINING MACHINE LEARNING MODEL
    Publication number: 20220335333
    Abstract: Methods of generating a characteristic pattern for a patterning process and training a machine learning model. A method of training a machine learning model configured to generate a characteristic pattern for a mask pattern includes obtaining (i) a reference characteristic pattern that meets a satisfactory threshold related to manufacturing of the mask pattern, and (ii) a continuous transmission mask (CTM) for use in generating the mask pattern; and training, based on the reference characteristic pattern and the CTM, the machine learning model such that a first metric between the characteristic pattern and the CTM, and a second metric between the characteristic pattern and the reference characteristic pattern is reduced.
    Type: Application
    Filed: August 21, 2020
    Publication date: October 20, 2022
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Yu CAO, Greggory SCRANTON, Jing SU, Yi ZOU