Patents by Inventor Gregor ELLIOTT

Gregor ELLIOTT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor wafer mass metrology apparatus and semiconductor wafer mass metrology method
    Patent number: 12288702
    Abstract: A semiconductor wafer mass metrology apparatus comprising: a measurement chamber for measuring the weight and/or the mass of a semiconductor wafer; a first temperature changing part for changing a temperature of the semiconductor wafer before the semiconductor wafer is transported into the measurement chamber; and a first temperature sensor for sensing a first temperature, wherein the first temperature is: a temperature of the first temperature changing part; or a temperature of the semiconductor wafer when the semiconductor wafer is on the first temperature changing part, or when the semiconductor wafer leaves the first temperature changing part.
    Type: Grant
    Filed: April 3, 2019
    Date of Patent: April 29, 2025
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Gregor Elliott, Eric Tonnis
  • METHOD AND APPARATUS FOR CONTROLLING THE TEMPERATURE OF A SEMICONDUCTOR WAFER
    Publication number: 20220034708
    Abstract: A semiconductor wafer mass metrology method comprising: controlling the temperature of a semiconductor wafer by: detecting information relating to the temperature of the semiconductor wafer; and controlling cooling or heating of the semiconductor wafer based on the detected information relating to the temperature of the semiconductor wafer; wherein controlling the cooling or heating of the semiconductor wafer comprises controlling a duration of the cooling or heating of the semiconductor wafer; and subsequently loading the semiconductor wafer onto a measurement area of a semiconductor wafer mass metrology apparatus.
    Type: Application
    Filed: September 18, 2019
    Publication date: February 3, 2022
    Inventors: Gregor ELLIOTT, Eric TONNIS, Paul HARRISON, Mark BERRY
  • SEMICONDUCTOR WAFER MASS METROLOGY APPARATUS AND SEMICONDUCTOR WAFER MASS METROLOGY METHOD
    Publication number: 20210175102
    Abstract: A semiconductor wafer mass metrology apparatus comprising: a measurement chamber for measuring the weight and/or the mass of a semiconductor wafer; a first temperature changing part for changing a temperature of the semiconductor wafer before the semiconductor wafer is transported into the measurement chamber; and a first temperature sensor for sensing a first temperature, wherein the first temperature is: a temperature of the first temperature changing part; or a temperature of the semiconductor wafer when the semiconductor wafer is on the first temperature changing part, or when the semiconductor wafer leaves the first temperature changing part.
    Type: Application
    Filed: April 3, 2019
    Publication date: June 10, 2021
    Inventors: Gregor ELLIOTT, Eric TONNIS