Abstract: A glass roll includes at least one glass film and one intermediate material one on top of the other in at least two layers onto a winding core. The glass film layers are held in place by the intermediate material layers. The glass roll is produced with a method including provision of a glass film, a winding core and a compressible intermediate material. At least one inside layer of the intermediate material is wound onto the winding core. The glass film and the intermediate material are wound onto the winding core in such a manner that the glass film is wound onto the winding core in alternating layers with the intermediate material. The intermediate material and/or the glass film is wound at a tensile stress acting in a longitudinal direction which causes a compression of the intermediate material and holds the glass film end in place on the glass roll.

Abstract: A glass roll includes at least one glass film and one intermediate material one on top of the other in at least two layers onto a winding core. The glass film layers are held in place by the intermediate material layers. The glass roll is produced with a method including provision of a glass film, a winding core and a compressible intermediate material. At least one inside layer of the intermediate material is wound onto the winding core. The glass film and the intermediate material are wound onto the winding core in such a manner that the glass film is wound onto the winding core in alternating layers with the intermediate material. The intermediate material and/or the glass film is wound at a tensile stress acting in a longitudinal direction which causes a compression of the intermediate material and holds the glass film end in place on the glass roll.

Abstract: A glass roll includes at least one glass film and one intermediate material one on top of the other in at least two layers onto a winding core. The glass film layers are held in place by the intermediate material layers. The glass roll is produced with a method including provision of a glass film, a winding core and a compressible intermediate material. At least one inside layer of the intermediate material is wound onto the winding core. The glass film and the intermediate material are wound onto the winding core in such a manner that the glass film is wound onto the winding core in alternating layers with the intermediate material. The intermediate material and/or the glass film is wound at a tensile stress acting in a longitudinal direction which causes a compression of the intermediate material and holds the glass film end in place on the glass roll.

Abstract: A method for separating a thin glass sheet, such as a glass film along a predefined cutting line provides the cutting line immediately has a temperature of greater than 250 K below the transformation point Tg of the glass of the thin sheet of glass, including the input of energy along the cutting line using a laser beam which acts such that a separation of the thin glass sheet occurs.

Abstract: The invention relates to a device for the storage of at least one photomask for lithographic projection and a method for using the device in an exposure installation. A container is suitable for receiving a photomask. The container has a housing, a closable opening device situated at the container housing and serving for the entry and issuing of the photomask, and one gas inlet opening arranged to purge the photomask. The invention also relates to a method for using the device in an exposure installation.

Abstract: An installation for processing a semiconductor wafer includes a semiconductor fabrication device having a load port, on which an identity code that can be read optically or through an effective electromagnetic field is stored. A mobile device, for example, a container communicating with the load port or a vehicle for transporting such a container, contains a corresponding reader to determine the identifier. The configuration makes the flexible determination of position within a fabrication facility possible. Also provided is a method for operating the installation.

Abstract: A system for handling a semiconductor product container contains a handler for transporting and positioning the container. A loading/unloading position requires first support members forming part of a loading/unloading device engaging with second support members forming part of the container. The system contains a detector for detecting reference point positions of the container and a localization device for computing the position of the container from the detected reference point positions, and allows for handling the containers without the need of mounting any support pins on each storage location.

Abstract: An installation for processing a semiconductor wafer includes a semiconductor fabrication device having a load port, on which an identity code that can be read optically or through an effective electromagnetic field is stored. A mobile device, for example, a container communicating with the load port or a vehicle for transporting such a container, contains a corresponding reader to determine the identifier. The configuration makes the flexible determination of position within a fabrication facility possible. Also provided is a method for operating the installation.