Patents by Inventor Gregor Larbig

Gregor Larbig has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20260117026
    Abstract: A new class of dielectric polymer material, which is particularly suitable for the manufacturing of electronic devices, is formed by reacting bismaleimide compounds and shows an advantageous well-balanced profile of favorable material properties. The bismaleimide compounds have an oligomeric structure with an heteroaromatic extended repeating unit in the middle part of the molecule and maleimide groups at each terminal end of the molecule. There is further provided a method for forming said dielectric polymer material. Beyond that, the present invention relates to the dielectric polymer material and to an electronic device including the same.
    Type: Application
    Filed: November 29, 2022
    Publication date: April 30, 2026
    Inventors: GREGOR LARBIG, FRANK MEYER, PAWEL MISKIEWICZ
  • Publication number: 20260071094
    Abstract: Synthesis of guanidinium-based polymers is disclosed. Chemical Mechanical Planarization (CMP) slurries comprise abrasives; activator; oxidizing agent; additive comprising guanidinium-based polymers; and water. The use of the synthesized guanidinium-based polymers in the CMP slurries reduces dishing and erosion in highly selective tungsten slurries.
    Type: Application
    Filed: August 30, 2023
    Publication date: March 12, 2026
    Inventors: Gregor Larbig, Peer Kirsch, Xiaobo Shi
  • Publication number: 20260044074
    Abstract: Compounds of structure (I) are described wherein, R1, R2, R1a and R2a are independently selected from H, nitro, cyano, and an alkylsulfonyl, wherein at least two of R1, R2, R1a and R2a are independently selected from nitro, cyano, and an alkylsulfonyl, and X? is not a halide, tosylate, trifluoromethylsulfonate, tetrafluoroborate, an aryl-substituted borates, hexafluorophosphate, hexafluoroarsenate, acetate, trifluoroacetate, methane sulfonate, C-2 to C-20 linear unsubstituted alkyl sulfonates, naphthalenesulfonate, and camphorsulfonate. Also described are EUV negative and positive chemically amplified photoresist compostions containing said compound and the process of using these photoresist to pattern a substrate.
    Type: Application
    Filed: February 19, 2024
    Publication date: February 12, 2026
    Inventors: Ralph R. Dammel, Gregor Larbig, Kun Si
  • Publication number: 20250215130
    Abstract: Synthesis of polycationic polymer or copolymer is disclosed. The polycationic polymer or copolymer are formed by at least one first cationic monomer and at least one second cationic monomer wherein the first cationic monomer and the second cationic monomer have different cationic groups; such as imidazolium group and non-imidazolium group. Chemical Mechanical Planarization (CMP) slurries comprise abrasives; activator; oxidizing agent; additive comprising polycationic polymer or copolymer; and water are also disclosed. The use of the synthesized polycationic polymer or copolymer in the CMP slurries reduces dishing and erosion in highly selective tungsten slurries.
    Type: Application
    Filed: April 7, 2023
    Publication date: July 3, 2025
    Inventors: GREGOR LARBIG, XIAOBO SHI
  • Publication number: 20240400861
    Abstract: Synthesis of triazole- and/or triazolium-based polymers is disclosed. Chemical Mechanical Planarization (CMP) slurries comprise abrasives; activator; oxidizing agent; additive comprising triazole- and/or triazolium-based polymers; and water. The use of the synthesized triazole- and/or triazolium-based polymers in the CMP slurries reduces dishing and erosion in highly selective tungsten slurries.
    Type: Application
    Filed: September 29, 2022
    Publication date: December 5, 2024
    Inventors: Gregor Larbig, Peer Kirsch, Matthias Hengst, Xiaobo Shi, Matthias Stender
  • Publication number: 20240261931
    Abstract: Synthesis of phosphonium based polymers is disclosed. Chemical Mechanical Planarization (CMP) slurries comprise abrasives; activator; oxidizing agent; additive comprising phosphonium based polymers; and water. The use of the synthesized phosphonium based polymers in the CMP slurries reduces dishing and erosion in highly selective tungsten slurries.
    Type: Application
    Filed: June 3, 2022
    Publication date: August 8, 2024
    Inventors: GREGOR LARBIG, INBAL DAVIDI, MATTHIAS STENDER, XIAOBO SHI
  • Publication number: 20240254262
    Abstract: The present invention relates to a new class of dielectric polymer material, which is particularly suitable for the manufacturing of electronic devices. The dielectric polymer material is formed by reacting bismaleimide compounds and shows an advantageous well-balanced profile of favorable material properties. The bismaleimide compounds have an oligomeric structure with an oligoamide extended repeating unit in the middle part of the molecule and maleimide groups at each terminal end of the molecule. There is further provided a method for forming said dielectric polymer material. Beyond that, the present invention relates to the dielectric polymer material and to an electronic device comprising the same.
    Type: Application
    Filed: April 20, 2022
    Publication date: August 1, 2024
    Applicant: Merck Patent GmbH
    Inventors: Gregor LARBIG, Frank Egon MEYER, Pawel MISKIEWICZ
  • Publication number: 20240247090
    Abstract: Synthesis of imidazolium-based poly(ionic liquid)s is disclosed. Chemical Mechanical Planarization (CMP) slurries comprise abrasives; activator; oxidizing agent; additive comprising imidazolium-based poly(ionic liquid); and water. The use of the synthesized imidazolium-based poly(ionic liquid)s in the CMP slurries reduces dishing and erosion in highly selective tungsten slurries.
    Type: Application
    Filed: May 16, 2022
    Publication date: July 25, 2024
    Inventors: Gregor Larbig, PEER KIRSCH, MATTHIAS STENDER, XIAOBO SHI
  • Patent number: 11999893
    Abstract: A polymerizable mixture which can be used to form a dielectric material for the preparation of passivation layers in electronic devices comprises a first monomer and a second monomer which may react to form a copolymer providing excellent film forming capability, excellent thermal properties, and excellent mechanical properties. The polymerizable mixture can be used in a method for forming copolymers and the copolymers can be used in an electronic device as dielectric material. The copolymers can also be used in a manufacturing method for preparing a packaged microelectronic structure and microelectronic devices comprising the packaged microelectronic structure.
    Type: Grant
    Filed: October 15, 2019
    Date of Patent: June 4, 2024
    Assignee: MERCK PATENT GMBH
    Inventors: Gregor Larbig, Pawel Miskiewicz
  • Publication number: 20240174805
    Abstract: The present invention relates to a new class of dielectric polymer material, which is particularly suitable for the manufacturing of electronic devices. The dielectric polymer material is formed by reacting bismaleimide compounds and shows an advantageous well-balanced profile of favorable material properties. The bismaleimide compounds have an oligomeric structure with an amide-imide extended repeating unit in the middle part of the molecule and maleimide groups at each terminal end of the molecule. There is further provided a method for forming said dielectric polymer material. Beyond that, the present invention relates to the dielectric polymer material and to an electronic device comprising the same.
    Type: Application
    Filed: March 1, 2022
    Publication date: May 30, 2024
    Applicant: MERCK PATENT GMBH
    Inventors: Gregor LARBIG, Frank Egon MEYER, Pawel MISKIEWICZ
  • Patent number: 11959007
    Abstract: The present invention relates to a novel class of polymers which can be used as dielectric material for the preparation of passivation layers in electronic devices. The polymers are prepared from polymerizable compounds having mesogenic groups and they provide excellent film forming capability and excellent mechanical properties and have a low dielectric constant and a low coefficient of thermal expansion (CTE). There is further provided a method for forming said polymers and an electronic device containing said polymers as dielectric material. Beyond that, the present invention relates to a manufacturing method for preparing a packaged microelectronic structure and to a microelectronic device comprising said packaged microelectronic structure formed by said manufacturing method.
    Type: Grant
    Filed: January 21, 2019
    Date of Patent: April 16, 2024
    Assignee: MERCK PATENT GMBH
    Inventors: Frank Meyer, Gregor Larbig, Karsten Koppe
  • Publication number: 20240010796
    Abstract: The present invention relates to a new class of dielectric polymer material, which is particularly suitable for the manufacturing of electronic devices. The dielectric polymer material is formed by reacting bismaleimide compounds and shows an advantageous well-balanced profile of favorable material properties. The bismaleimide compounds have an oligomeric structure with a cardo and/or spiro moiety containing repeating unit in the middle part of the molecule and maleimide groups at each terminal end of the molecule. There is further provided a method for forming said dielectric polymer material and an electronic device comprising the same as dielectric material.
    Type: Application
    Filed: December 2, 2021
    Publication date: January 11, 2024
    Applicant: MERCK PATENT GMBH
    Inventors: Gregor LARBIG, Frank Egon MEYER, Pawel MISKIEWICZ
  • Patent number: 11834598
    Abstract: The present invention relates to a polymerizable mixture which can be used to form a dielectric material for the preparation of passivation layers in electronic devices. The polymerizable mixture comprises a first monomer and a second monomer which may react to form a copolymer providing excellent film forming capability, excellent thermal properties and excellent mechanical properties. There is further provided a method for forming said copolymers and an electronic device containing said copolymers as dielectric material. Beyond that, the present invention relates to a manufacturing method for preparing a packaged microelectronic structure and to a microelectronic device comprising said packaged microelectronic structure formed by said manufacturing method.
    Type: Grant
    Filed: October 15, 2019
    Date of Patent: December 5, 2023
    Assignee: Merck Patent GmbH
    Inventors: Gregor Larbig, Pawel Miskiewicz, Frank Meyer, Joerg Pahnke, Karsten Koppe
  • Publication number: 20210355381
    Abstract: The present invention relates to a polymerizable mixture which can be used to form a dielectric material for the preparation of passivation layers in electronic devices. The polymerizable mixture comprises a first monomer and a second monomer which may react to form a copolymer providing excellent film forming capability, excellent thermal properties and excellent mechanical properties. There is further provided a method for forming said copolymers and an electronic device containing said copolymers as dielectric material. Beyond that, the present invention relates to a manufacturing method for preparing a packaged microelectronic structure and to a microelectronic device comprising said packaged microelectronic structure formed by said manufacturing method.
    Type: Application
    Filed: October 15, 2019
    Publication date: November 18, 2021
    Applicant: Merck Patent GmbH
    Inventors: Gregor LARBIG, Pawel MISKIEWICZ, Frank MEYER, Joerg PAHNKE, Karsten KOPPE
  • Publication number: 20210355383
    Abstract: The present invention relates to a polymerizable mixture which can be used to form a dielectric material for the preparation of passivation layers in electronic devices. The polymerizable mixture comprises a first monomer and a second monomer which may react to form a copolymer providing excellent film forming capability, excellent thermal properties and excellent mechanical properties. There is further provided a method for forming said copolymers and an electronic device containing said copolymers as dielectric material. Beyond that, the present invention relates to a manufacturing method for preparing a packaged microelectronic structure and to a microelectronic device comprising said packaged microelectronic structure formed by said manufacturing method.
    Type: Application
    Filed: October 15, 2019
    Publication date: November 18, 2021
    Applicant: MERCK PATENT GMBH
    Inventors: Gregor LARBIG, Pawel MISKIEWICZ
  • Publication number: 20210062091
    Abstract: The present invention relates to a novel class of polymers which can be used as dielectric material for the preparation of passivation layers in electronic devices. The polymers are prepared from polymerizable compounds having mesogenic groups and they provide excellent film forming capability and excellent mechanical properties and have a low dielectric constant and a low coefficient of thermal expansion (CTE). There is further provided a method for forming said polymers and an electronic device containing said polymers as dielectric material. Beyond that, the present invention relates to a manufacturing method for preparing a packaged microelectronic structure and to a microelectronic device comprising said packaged microelectronic structure formed by said manufacturing method.
    Type: Application
    Filed: January 21, 2019
    Publication date: March 4, 2021
    Applicant: MERCK PATENT GMBH
    Inventors: Frank MEYER, Gregor LARBIG, Karsten KOPPE
  • Patent number: 10413614
    Abstract: The present invention relates to a conjugate containing at least one kidney-selective carrier molecule and at least one active compound which has a protective action for the kidney against nephrotoxic active compounds, to a process for the preparation of the conjugate, to the use thereof for the protection of the kidney against nephrotoxic active compounds, and to a medicament comprising the conjugate.
    Type: Grant
    Filed: October 3, 2017
    Date of Patent: September 17, 2019
    Assignee: Merck Patent GmbH
    Inventors: Armin Kuebelbeck, Gregor Larbig, Stefan Arnold, Walter Mier, Uwe Haberkorn
  • Patent number: 10111952
    Abstract: The invention relates to ultrasmall, monodisperse nanoparticles comprising silicon dioxide to the surface of which at least one antigen is attached. The nanoparticles can be used for the immunoprophylaxis or immunotherapy of cancer. The invention also relates to a method for the targeting of antigens at antigen-presenting cells and for the activation of the immune system, where the efficiency of targeting and/or immunoactivation are set via the particle characteristics. The invention also relates to a method for the active and passive immunisation of a mammal.
    Type: Grant
    Filed: October 6, 2017
    Date of Patent: October 30, 2018
    Assignee: MERCK PATENT GmbH
    Inventors: Markus Weigandt, Andrea Hanefeld, Armin Kuebelbeck, Gregor Larbig
  • Patent number: 10065993
    Abstract: The present invention relates to a peptide which consists of more than 50% of sequence sections of the formula -(An-Bm-Co)-, and to a conjugate containing the peptide and at least one covalently bonded active compound, and to a process for the preparation of the conjugate. The present invention furthermore relates to the use of the peptide and the conjugate for targeting of the kidney, and to a medicament comprising the peptide or conjugate.
    Type: Grant
    Filed: April 16, 2014
    Date of Patent: September 4, 2018
    Assignee: MERCK PATENT GMBH
    Inventors: Armin Kuebelbeck, Gregor Larbig, Stefan Arnold, Walter Mier
  • Publication number: 20180071386
    Abstract: The invention relates to ultrasmall, monodisperse nanoparticles comprising silicon dioxide to the surface of which at least one antigen is attached. The nanoparticles can be used for the immunoprophylaxis or immunotherapy of cancer. The invention also relates to a method for the targeting of antigens at antigen-presenting cells and for the activation of the immune system, where the efficiency of targeting and/or immunoactivation are set via the particle characteristics. The invention also relates to a method for the active and passive immunisation of a mammal.
    Type: Application
    Filed: October 6, 2017
    Publication date: March 15, 2018
    Applicant: Merck Patent GmbH
    Inventors: Markus Weigandt, Andrea Hanefeld, Armin Kuebelbeck, Gregor Larbig