Patents by Inventor Gregory A. Hebner

Gregory A. Hebner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • UV absorption control of thin film growth
    Patent number: 5032435
    Abstract: A system for monitoring and controlling the rate of growth of thin films in an atmosphere of reactant gases measures the UV absorbance of the atmosphere and calculates the partial pressure of the gases. The flow of reactant gases is controlled in response to the partial pressure.
    Type: Grant
    Filed: March 27, 1989
    Date of Patent: July 16, 1991
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventors: Robert M. Biefeld, Gregory A. Hebner, Kevin P. Killeen, Steven P. Zuhoski