Abstract: There is provided an electronically controlled, breath actuated vaporization device for generating vaporized material for inhalation by a user. The vaporization device includes a vaporization chamber for accommodating material to be vaporized and a mesh heater or other heater supported upstream of the vaporization chamber which is operable to heat air that passes through the mesh heater or other heater during an inhalation event. A closed loop control scheme may be employed to control heat generated by the heater to maintain a temperature of the air delivered to the vaporization chamber at or within a predetermined tolerance of a desired vaporization temperature for at least a majority of a duration of the inhalation event.

Abstract: A truss-formation apparatus comprising two truss makers and a lateral stage, wherein the truss makers create trusses and each truss maker comprises thermal dies, heaters with temperature sensors, and mandrels; wherein the truss makers form trusses that comprise parallel truss elements and battens; wherein a pultrusion actuator pulls parallel truss elements down along a mandrel; wherein a batten actuator causes a thermal die to rotate around a mandrel forming battens that connect parallel truss elements to one another; and wherein the lateral stage comprises a thermal die and traverses the gap between the parallel trusses forming cross members that connect the trusses.

Abstract: Presented herein are systems, methods and devices relating to miniature actuatable platform systems. According to one embodiment, the systems, methods, and devices relate to controllably actuated miniature platform assemblies including a miniature mirror.

Abstract: Presented herein are systems, methods and devices relating to miniature actuatable platform systems. According to one embodiment, the systems, methods, and devices relate to controllably actuated miniature platform assemblies including a miniature mirror.

Abstract: Presented herein are systems, methods and devices relating to miniature actuatable platform systems. According to one embodiment, the systems, methods, and devices relate to controllably actuated miniature platform assemblies including a miniature mirror.

Abstract: A tuning fork gyroscope design where at least one proof mass is supported above a substrate. At least one drive electrode is also supported above the substrate adjacent the proof mass. Typically, the proof mass and the drive electrode include interleaved electrode fingers. A sense plate or shield electrode on the substrate beneath the proof mass extends completely under the extent of the electrode fingers of proof mass.

Abstract: Presented herein are systems, methods and devices relating to miniature actuatable platform systems. According to one embodiment, the systems, methods, and devices relate to controllably actuated miniature platform assemblies including a miniature mirror.

Abstract: A tuning fork gyroscope design where at least one proof mass is supported above a substrate. At least one drive electrode is also supported above the substrate adjacent the proof mass. Typically, the proof mass and the drive electrode include interleaved electrode fingers. A sense plate or shield electrode on the substrate beneath the proof mass extends completely under the extent of the electrode fingers of proof mass.

Abstract: An array of magnetically actuated MEMS mirror devices is provided having stationary magnets configured to provide strong magnetic fields in the plane of the mirrors without any magnets or magnet-system components in the plane of the mirrors. Also, a magnetically actuated mirror device is provided that includes an improved actuation coil configuration that provides greater torque during mirror actuation. In addition, a mechanism is provided to detect the angular deflection of a moveable mirror. Also, an improved process is provided for manufacturing MEMS mirror devices.

Abstract: One embodiment is directed to a gimbal mechanism for a MEMS mirror device having folded flexure hinges. Another embodiment is directed to a gimbal mechanism having a frame with through-holes or recesses distributed thereabout to reduce weight of said frame. Other embodiments are directed to improved electrode structures for electrostatically actuated MEMS devices. Other embodiments are directed to methods for fabricating electrodes for electrostatically actuated MEMS devices. Other embodiments are directed to methods of fabricating through-wafer interconnect devices. Other embodiments are directed to MEMS mirror array packaging. Other embodiments are directed to electrostatically actuated MEMS devices having driver circuits integrated therewith. Other embodiments are directed to methods of patterning wafers with a plurality of through-holes. Other embodiments are directed to methods of forming moveable structures in MEMS devices.

Abstract: A flyer assembly is adapted for launching with, transit in, and deployment from an artillery shell having a central void region extending along a ballistic shell axis. The flyer assembly includes a jettisonable shroud and a flyer. The shroud extends along a shroud axis, and is positionable within the central void region with the shroud axis substantially parallel to the shell axis. The flyer is adapted to withstand a launch acceleration force along a flyer axis when in a first state, and to effect aerodynamic flight when in a second state. When in the first state, the flyer is positionable within the shroud with the flyer axis parallel to the shroud axis and the shell axis. The flyer includes a body member disposed about the flyer axis, and a foldable wing assembly mounted to the body member. The wing assembly is configurable in a folded state characterized by a plurality of nested wing segments when the flyer is in the first state.

Abstract: A flyer assembly is adapted for launching with, transit in, and deployment from an artillery shell having a central void region extending along a ballistic shell axis. The flyer assembly includes a jettisonable shroud and a flyer. The shroud extends along a shroud axis, and is positionable within the central void region with the shroud axis substantially parallel to the shell axis. The flyer is adapted to withstand a launch acceleration force along a flyer axis when in a first state, and to effect aerodynamic flight when in a second state. When in the first state, the flyer is positionable within the shroud with the flyer axis parallel to the shroud axis and the shell axis. The flyer includes a body member disposed about the flyer axis, and a foldable wing assembly mounted to the body member. The wing assembly is configurable in a folded state characterized by a plurality of nested wing segments when the flyer is in the first state.

Abstract: One embodiment is directed to a gimbal mechanism for a MEMS mirror device having folded flexure hinges. Another embodiment is directed to a gimbal mechanism having a frame with through-holes or recesses distributed thereabout to reduce weight of said frame. Other embodiments are directed to improved electrode structures for electrostatically actuated MEMS devices. Other embodiments are directed to methods for fabricating electrodes for electrostatically actuated MEMS devices. Other embodiments are directed to methods of fabricating through-wafer interconnect devices. Other embodiments are directed to MEMS mirror array packaging. Other embodiments are directed to electrostatically actuated MEMS devices having driver circuits integrated therewith. Other embodiments are directed to methods of patterning wafers with a plurality of through-holes. Other embodiments are directed to methods of forming moveable structures in MEMS devices.

Abstract: A flyer assembly is adapted for launching with, transit in, and deployment from an artillery shell having a central void region extending along a ballistic shell axis. The flyer assembly includes a jettisonable shroud and a flyer. The shroud extends along a shroud axis, and is positionable within the central void region with the shroud axis substantially parallel to the shell axis. The flyer is adapted to withstand a launch acceleration force along a flyer axis when in a first state, and to effect aerodynamic flight when in a second state. When in the first state, the flyer is positionable within the shroud with the flyer axis parallel to the shroud axis and the shell axis. The flyer includes a body member disposed about the flyer axis, and a foldable wing assembly mounted to the body member. The wing assembly is configurable in a folded state characterized by a plurality of nested wing segments when the flyer is in the first state.

Abstract: An array of magnetically actuated MEMS mirror devices is provided having stationary magnets configured to provide strong magnetic fields in the plane of the mirrors without any magnets or magnet-system components in the plane of the mirrors. Also, a magnetically actuated mirror device is provided that includes an improved actuation coil configuration that provides greater torque during mirror actuation. In addition, a mechanism is provided to detect the angular deflection of a moveable mirror. Also, an improved process is provided for manufacturing MEMS mirror devices.

Abstract: A micromechanical tuning fork gyroscope has an input axis out of the plane of the structure. In one embodiment, capacitor plates are provided in parallel strips beneath two apertured, planar proof masses suspended from a substrate by a support structure. The proof masses are paired and set in opposed vibrational motion by an electrostatic comb drive. In response to an input angular rate about the out-of-plane input axis, the proof masses translate with respect to the striped capacitors, thereby varying the capacitance between the capacitor strips and the proof masses as a function of the input rate. In another embodiment, proof mass combs of a comb drive are meshed between fixed drive combs which are electrically excited in pairs 180° out of phase.

Abstract: A microcavity apparatus and systems for maintaining microcavity spacing over a macroscopic area. An application of this invention is a microscale generator. This microscale generator includes a first element for receiving energy; a second element, opposite the first element for transferring energy; at least one panel on either of the first element or the second element, the panel facing the other element; a device for controlling the distance between the at least one panel and the facing element to form a predetermined, sub-micron gap between the panel and the facing element for increasing energy transfer to the element for receiving; and a device, responsive to the energy transfer, for generating electricity.