Patents by Inventor Gregory A. Schwind
Gregory A. Schwind has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8217565Abstract: A stable cold field electron emitter is produced by forming a coating on an emitter base material. The coating protects the emitter from the adsorption of residual gases and from the impact of ions, so that the cold field emitter exhibits short term and long term stability at relatively high pressures and reasonable angular electron emission.Type: GrantFiled: January 10, 2011Date of Patent: July 10, 2012Assignee: FEI CompanyInventors: Theodore Carl Tessner, II, Gregory A. Schwind, Lynwood W. Swanson
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Patent number: 8053725Abstract: Applicants have found that the asymmetrical energy distribution of ions from an ion source allow chromatic aberration to be reduced by filtering ions in the low energy beam tail without significantly reducing processing time. A preferred embodiment includes within an ion beam column a filter that removes the low energy ions from the beam.Type: GrantFiled: June 29, 2009Date of Patent: November 8, 2011Assignee: FEI CompanyInventors: Gregory A. Schwind, Jonathan H. Orloff
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Publication number: 20110101238Abstract: A stable cold field electron emitter is produced by forming a coating on an emitter base material. The coating protects the emitter from the adsorption of residual gases and from the impact of ions, so that the cold field emitter exhibits short term and long term stability at relatively high pressures and reasonable angular electron emission.Type: ApplicationFiled: January 10, 2011Publication date: May 5, 2011Applicant: FEI CompanyInventors: Theodore Carl Tessner, II, Gregory A. Schwind, Lynwood W. Swanson
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Patent number: 7888654Abstract: A stable cold field electron emitter is produced by forming a coating on an emitter base material. The coating protects the emitter from the adsorption of residual gases and from the impact of ions, so that the cold field emitter exhibits short term and long term stability at relatively high pressures and reasonable angular electron emission.Type: GrantFiled: September 14, 2007Date of Patent: February 15, 2011Assignee: FEI CompanyInventors: Theodore Carl Tessner, II, Gregory A. Schwind, Lynwood W. Swanson
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Publication number: 20100327180Abstract: Applicants have found that the asymmetrical energy distribution of ions from an ion source allow chromatic aberration to be reduced by filtering ions in the low energy beam tail without significantly reducing processing time. A preferred embodiment includes within an ion beam column a filter that removes the low energy ions from the beam.Type: ApplicationFiled: June 29, 2009Publication date: December 30, 2010Applicant: FEI COMPANYInventors: Gregory A. Schwind, Jonathan H. Orloff
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Patent number: 7544523Abstract: A method of batch fabrication using established photolithographic techniques allowing nanoparticles or nanodevices to be fabricated and mounted into a macroscopic device in a repeatable, reliable manner suitable for large-scale mass production. Nanoparticles can be grown on macroscopic “modules” which can be easily manipulated and shaped to fit standard mounts in various devices.Type: GrantFiled: February 28, 2006Date of Patent: June 9, 2009Assignee: FEI CompanyInventors: Gregory Schwind, Gerald Magera, Lawrence Scipioni
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Publication number: 20080174225Abstract: A stable cold field electron emitter is produced by forming a coating on an emitter base material. The coating protects the emitter from the adsorption of residual gases and from the impact of ions, so that the cold field emitter exhibits short term and long term stability at relatively high pressures and reasonable angular electron emission.Type: ApplicationFiled: September 14, 2007Publication date: July 24, 2008Applicant: FEI CompanyInventors: Theodore Carl Tessner, Gregory A. Schwind, Lynwood W. Swanson
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Publication number: 20070148991Abstract: A method of batch fabrication using established photolithographic techniques allowing nanoparticles or nanodevices to be fabricated and mounted into a macroscopic device in a repeatable, reliable manner suitable for large-scale mass production. Nanoparticles can be grown on macroscopic “modules” which can be easily manipulated and shaped to fit standard mounts in various devices.Type: ApplicationFiled: February 28, 2006Publication date: June 28, 2007Applicant: FEI CompanyInventors: Gregory Schwind, Gerald Magera, Lawrence Scipioni
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Patent number: 7064477Abstract: A low input power consumption, compact thermal field emitter is suitable for use in electron beam systems, particularly those systems that use an array of electron beams or a miniature electron beam system. The thermal field emitter design reduces heat loss by reducing heat transfer to the base. To achieve reduced loses the design incorporates the use of high electrical resistivity, low thermal conductivity materials for construction of the filament posts and the filaments. Such materials further reduce heat loss and reduce input current requirements. In one embodiment, the base includes counterbores that reduce the heat conduction path between the filament posts and the base, and moves the contact area further from the filament.Type: GrantFiled: August 2, 2004Date of Patent: June 20, 2006Assignee: FEI CompanyInventors: Gerald G. Magera, Gregory A. Schwind, James B. McGinn, David S. Jun
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Patent number: 6977384Abstract: The invention adds one or more surface contour(s) to the bombarded area(s) within ion columns to greatly reduce the likelihood that back sputtered material will reach the ion generating source. A number of different surface contours are disclosed including angled surfaces, surfaces defining cups to capture back sputtered material, pre-textured and forested surfaces. The different surfaces can be used in any combination. The reduction in back sputtered material reaching the ion source reduces the time to stability, greatly increases the working stability, and increases the lifespan of the source.Type: GrantFiled: September 23, 2003Date of Patent: December 20, 2005Assignee: FEI CompanyInventors: James B. McGinn, Gregory A. Schwind
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Publication number: 20050045834Abstract: The invention adds one or more surface contour(s) to the bombarded area(s) within ion columns to greatly reduce the likelihood that back sputtered material will reach the ion generating source. A number of different surface contours are disclosed including angled surfaces, surfaces defining cups to capture back sputtered material, pre-textured and forested surfaces. The different surfaces can be used in any combination. The reduction in back sputtered material reaching the ion source reduces the time to stability, greatly increases the working stability, and increases the lifespan of the source.Type: ApplicationFiled: September 23, 2003Publication date: March 3, 2005Inventors: James McGinn, Gregory Schwind
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Publication number: 20050001220Abstract: A low input power consumption, compact thermal field emitter is suitable for use in electron beam systems, particularly those systems that use an array of electron beams or a miniature electron beam system. The thermal field emitter design reduces heat loss by reducing heat transfer to the base. To achieve reduced loses the design incorporates the use of high electrical resistivity, low thermal conductivity materials for construction of the filament posts and the filaments. Such materials further reduce heat loss and reduce input current requirements. In one embodiment, the base includes counterbores that reduce the heat conduction path between the filament posts and the base, and moves the contact area further from the filament.Type: ApplicationFiled: August 2, 2004Publication date: January 6, 2005Applicant: FEI CompanyInventors: Gerald Magera, Gregory Schwind, James McGinn, David Jun
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Patent number: 6798126Abstract: An electron emitter is produced by applying a work function lowering material that does not require an extensive heating step before the material will function to lower the work function. By eliminating the extensive heating step, a small radius, highly tapered emitter tip will retain its shape to consistently produce a high angular intensity at a reasonable output power level.Type: GrantFiled: May 3, 2002Date of Patent: September 28, 2004Assignee: FEI CompanyInventors: Gregory A. Schwind, David S. Jun, Gerald G. Magera
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Patent number: 6771013Abstract: A low input power consumption, compact thermal field emitter is suitable for use in electron beam systems, particularly those systems that use an array of electron beams or a miniature electron beam system. The thermal field emitter design reduces heat loss by reducing heat transfer to the base. To achieve reduced loses the design incorporates the use of high electrical resistivity, low thermal conductivity materials for construction of the filament posts and the filaments. Such materials further reduce heat loss and reduce input current requirements. In one embodiment, the base includes counterbores that reduce the heat conduction path between the filament posts and the base, and moves the contact area further from the filament.Type: GrantFiled: October 16, 2001Date of Patent: August 3, 2004Assignee: FEI CompanyInventors: Gerald G. Magera, Gregory A. Schwind, James B. McGinn, David S. Jun
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Patent number: 6680562Abstract: A electron emission cathode includes an emitter having an apex from which electrons are emitted. The emitter is attached to a heating filament at a junction and extends from the junction both forward toward the apex and rearward. A reservoir of material that lowers the work function of the emitter is positioned on the rearward extending portion of the emitter. By positioning the reservoir on the rearward extending portion, the reservoir can be positioned sufficiently far from the junction to reduce its temperature and thereby greatly increase the useful life, of the emitter without adversely affected the emission characteristics of the source.Type: GrantFiled: August 15, 2000Date of Patent: January 20, 2004Assignee: FEI CompanyInventors: James B. McGinn, Sander G. den Hartog, David S. Jun, Gerald G. Magera, Gregory A. Schwind
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Publication number: 20030205958Abstract: An electron emitter is produced by applying a work function lowering material that does not require an extensive heating step before the material will function to lower the work function. By eliminating the extensive heating step, a small radius, highly tapered emitter tip will retain its shape to consistently produce a high angular intensity at a reasonable output power level.Type: ApplicationFiled: May 3, 2002Publication date: November 6, 2003Inventors: Gregory A. Schwind, David S. Jun, Gerald G. Magera
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Publication number: 20020079803Abstract: A low input power consumption, compact thermal field emitter is suitable for use in electron beam systems, particularly those systems that use an array of electron beams or a miniature electron beam system. The thermal field emitter design reduces heat loss by reducing heat transfer to the base. To achieve reduced loses the design incorporates the use of high electrical resistivity, low thermal conductivity materials for construction of the filament posts and the filaments. Such materials further reduce heat loss and reduce input current requirements. In one embodiment, the base includes counterbores that reduce the heat conduction path between the filament posts and the base, and moves the contact area further from the filament.Type: ApplicationFiled: October 16, 2001Publication date: June 27, 2002Inventors: Gerald G. Magera, Gregory A. Schwind, James B. McGinn, David S. Jun