Patents by Inventor Gregory Alan Vaughn

Gregory Alan Vaughn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240335954
    Abstract: End effector pads are provided that may be used to secure substrates to an end effector on a wafer handling robot. An end effector may have a plurality of end effector pads. Each of the end effector pads may have a thin diaphragm that allows a peripheral ring of the pad to tilt slightly to allow the ring to seal against a bottom surface of a bowed substrate. A vacuum may be used to pull down the substrate against a hard-stop on each end effector pad and hold the substrate more securely. The hard-stop may be used to consistently locate the z-position of the bottom surface of the substrate relative to the end effector.
    Type: Application
    Filed: October 5, 2022
    Publication date: October 10, 2024
    Inventors: Melinda P. Chen, Eric Bramwell Britcher, Charles N. Ditmore, Ryan Louis Mack, Gregory Alan Vaughn