Patents by Inventor Gregory B. Starnes

Gregory B. Starnes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for process control of alignment in dual damascene processes
    Patent number: 6486036
    Abstract: The present invention is directed to a method of performing alignment during processing of a semiconductor device. The method is comprised of: performing alignment registration on a plurality of layers on said semiconductor device; measuring misregistration of said alignment registration in relation to a predetermined standard alignment key; and generating an offset for a subsequent process layer on said semiconductor using said measure misregistration.
    Type: Grant
    Filed: June 28, 2000
    Date of Patent: November 26, 2002
    Assignee: Advanced Micro Devices, Inc.
    Inventors: John C. Miethke, Gregory B. Starnes
  • Resist flow method for defining openings for conductive interconnections in a dielectric layer
    Patent number: 6265306
    Abstract: The present invention is directed to a method of forming semiconductor devices. In one illustrative embodiment, the method comprises defining an opening in a layer of photoresist formed above a layer of dielectric material, heating the layer of photoresist to reduce the size of the opening in the layer of photoresist, and forming an opening in the layer of dielectric material that is defined by the reduced size opening in the layer of photoresist. The method further comprises removing the layer of photoresist and forming a conductive interconnection in the layer of dielectric material.
    Type: Grant
    Filed: January 12, 2000
    Date of Patent: July 24, 2001
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Gregory B. Starnes, Stephen Keetai Park