Patents by Inventor Gregory Boruta

Gregory Boruta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning anti-reflective coating process chamber parts
    Patent number: 12000039
    Abstract: A cleaning booth has a handheld blaster, which emits a pulsed electromagnetic wave that is produced by a wave source. A fiber-optic cable feeds the wave from the source to the blaster. An operator can aim the blaster toward a part that rests on a movable table in the booth. When the operator actuates the wave source, a radiation beam from the blaster ablates anti-reflective coating residue from the part. The cleaning operation can be performed in a same room as the anti-reflective coating process equipment.
    Type: Grant
    Filed: October 13, 2023
    Date of Patent: June 4, 2024
    Inventors: Michael Walach, Gregory Boruta
  • Cleaning anti-reflective coating process chamber parts
    Patent number: 12000040
    Abstract: A cleaning booth has a handheld blaster, which emits a pulsed electromagnetic wave that is produced by a wave source. A fiber-optic cable feeds the wave from the source to the blaster. An operator can aim the blaster toward a part that rests on a movable table in the booth. When the operator actuates the wave source, a radiation beam from the blaster ablates anti-reflective coating residue from the part. The cleaning operation can be performed in a same room as the anti-reflective coating process equipment.
    Type: Grant
    Filed: December 16, 2023
    Date of Patent: June 4, 2024
    Inventors: Michael Walach, Gregory Boruta