Patents by Inventor Gregory Caruyer
Gregory Caruyer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20190074817Abstract: A BAW resonator that is less prone to spurious modes comprises a bottom electrode, a top electrode, a bottom piezoelectric layer between the electrodes, a top piezoelectric layer between the bottom piezoelectric layer and the top electrode, and a conductive layer between the two piezoelectric layers.Type: ApplicationFiled: March 3, 2017Publication date: March 7, 2019Inventor: Gregory CARUYER
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Patent number: 8212324Abstract: A Micro Electro Mechanical Systems resonance device includes a substrate, and an input electrode, connected to an alternating current source having an input frequency. The device also includes an output electrode, and at least one anchoring structure, connected to the substrate. The device further includes a vibratile structure connected to an anchoring structure by at least one junction, having a natural acoustic resonant frequency. The vibration under the effect of the input electrode, when it is powered, generates, on the output electrode, an alternating current wherein the output frequency is equal to the natural frequency. The vibratile structure and/or the anchoring structure includes a periodic structure. The periodic structure includes at least first and second zones different from each other, and corresponding respectively to first and second acoustic propagation properties.Type: GrantFiled: April 6, 2009Date of Patent: July 3, 2012Assignee: STMicroelectronics SAInventors: Gregory Caruyer, Karim Segueni, Pascal Ancey, Bertrand Dubus
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Patent number: 7960900Abstract: The invention relates to a device consisting of an electromechanical microswitch comprising mobile beam (2). According to the invention, at least part (14) of the beam forms the piezoelectric element of a piezoelectric actuator.Type: GrantFiled: June 13, 2005Date of Patent: June 14, 2011Assignee: STMicroelectronics S.A.Inventors: Grégory Caruyer, Guillaume Bouche, Pascal Ancey
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Patent number: 7852488Abstract: The invention relates to a structure characterising device comprising means which are used for generating a first pump radiation and a second probe radiation and for transmitting different wavelength radiation, means for producing a time offset between said first pump and second probe radiation on the structure by means of detecting means of said second beam after the reflection or transmission thereof to said structure in such a way that an analysis signal is generated, means for processing said signal and identifying an area corresponding to the signal jump, for determining the jump amplitude according to different wavelengths, for comparing said amplitude with a theoretical amplitude variation pattern according to the wavelengths and for determining, for the wavelength characteristic for said theoretical pattern, a characteristic value associated to the structure thickness and to the radiation propagation velocity in said structure.Type: GrantFiled: June 19, 2006Date of Patent: December 14, 2010Assignee: Centre National de la Recherche Scientifique-CNRS-Inventors: Arnaud Devos, Grégory Caruyer
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Publication number: 20090289314Abstract: A Micro Electro Mechanical Systems resonance device includes a substrate, and an input electrode, connected to an alternating current source having an input frequency. The device also includes an output electrode, and at least one anchoring structure, connected to the substrate. The device further includes a vibratile structure connected to an anchoring structure by at least one junction, having a natural acoustic resonant frequency. The vibration under the effect of the input electrode, when it is powered, generates, on the output electrode, an alternating current wherein the output frequency is equal to the natural frequency. The vibratile structure and/or the anchoring structure includes a periodic structure. The periodic structure includes at least first and second zones different from each other, and corresponding respectively to first and second acoustic propagation properties.Type: ApplicationFiled: April 6, 2009Publication date: November 26, 2009Applicant: STMicroelectronics SAInventors: Gregory CARUYER, Karim Segueni, Pascal Ancey, Bertrand Dubus
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Patent number: 7550900Abstract: Acoustic resonator device (1) includes an active element (6) and a support provided with a membrane (5). The active element (6) is provided with at least one piezoelectric layer (10) and is surmounted by a multilayer stack (12). The multilayer stack (12) is provided with at least three layers, including at least one layer (15) of high acoustic impedance and at least one layer (13) of low acoustic impedance. An integrated circuit including at least one such acoustic resonator device is also disclosed.Type: GrantFiled: December 10, 2004Date of Patent: June 23, 2009Assignee: STMicroelectronics SAInventors: Guillaume Bouche, Gregory Caruyer, Pascal Ancey
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Publication number: 20080315131Abstract: The invention relates to a structure characterising device comprising means which are used for generating a first pump radiation and a second probe radiation and for transmitting different wavelength radiation, means for producing a time offset between said first pump and second probe radiation on the structure by means of detecting means of said second beam after the reflection or transmission thereof to said structure in such a way that an analysis signal is generated, means for processing said signal and identifying an area corresponding to the signal jump, for determining the jump amplitude according to different wavelengths, for comparing said amplitude with a theoretical amplitude variation pattern according to the wavelengths and for determining, for the wavelength characteristic for said theoretical pattern, a characteristic value associated to the structure thickness and to the radiation propagation velocity in said structure.Type: ApplicationFiled: June 19, 2006Publication date: December 25, 2008Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE-CNRSInventors: Arnaud Devos, Gregory Caruyer
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Publication number: 20080283373Abstract: The invention relates to a device consisting of an electromechanical microswitch comprising mobile beam (2). According to the invention, at least part (14) of the beam forms the piezoelectric element of a piezoelectric actuator.Type: ApplicationFiled: June 13, 2005Publication date: November 20, 2008Applicant: STMicroelectronics S.A.Inventors: Grégory Caruyer, Guillaume Bouche, Pascal Ancey
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Patent number: 7391143Abstract: An acoustic resonator assembly includes a layer of high-acoustic-impedance material and a layer of low-acoustic-impedance material made of a low-electrical-permittivity material. This assembly may support the resonator over an interconnect layer or act as a decoupling assembly between two active elements of the resonator. The assembly may alternatively include three low-acoustic impedance layers. Alternatively, the assembly may include three acoustic impedance layers wherein two of the layers are low acoustic impedance layers and the third layer has a higher acoustic impedance than the first two or alternatively is a high-acoustic impedance layer.Type: GrantFiled: April 2, 2007Date of Patent: June 24, 2008Assignee: STMicroelectronics S.A.Inventors: Guillaume Bouche, Gregory Caruyer, Pascal Ancey
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Patent number: 7391142Abstract: A support 7 for an acoustic resonator 4 includes at least one bilayer assembly having a layer of high acoustic impedance material 11 and a layer of low acoustic impedance material 12 made of material having a low electrical permittivity.Type: GrantFiled: November 27, 2003Date of Patent: June 24, 2008Assignee: STMicroelectronics S.A.Inventors: Guillaume Bouche, Gregory Caruyer, Pascal Ancey
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Patent number: 7310029Abstract: The resonator comprises a piezoelectric layer arranged between two electrodes. An electrical heating resistor is arranged in thermal contact with at least one of the electrodes. Temporary heating of the electrode enables the material constituting the electrode to be partially evaporated, so as to thin the electrode and thus adjust the resonance frequency. Measurement of the resonance frequency in the course of evaporation enables the heating to be interrupted when the required resonance frequency is obtained. One of the electrodes can be arranged on a substrate formed by an acoustic Bragg grating. The resonator can comprise a substrate comprising a cavity whereon one of the electrodes is at least partially arranged.Type: GrantFiled: July 6, 2004Date of Patent: December 18, 2007Assignees: Commissariat a l'energie Atomique, ST Microelectronics SAInventors: Philippe Robert, Pascal Ancey, Grégory Caruyer
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Publication number: 20070182284Abstract: An acoustic resonator assembly includes a layer of high-acoustic-impedance material and a layer of low-acoustic-impedance material made of a low-electrical-permittivity material. This assembly may support the resonator over an interconnect layer or act as a decoupling assembly between two active elements of the resonator. The assembly may alternatively include three low-acoustic impedance layers. Alternatively, the assembly may include three acoustic impedance layers wherein two of the layers are low acoustic impedance layers and the third layer has a higher acoustic impedance than the first two or alternatively is a high-acoustic impedance layer.Type: ApplicationFiled: April 2, 2007Publication date: August 9, 2007Inventors: Guillaume Bouche, Gregory Caruyer, Pascal Ancey
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Patent number: 7180224Abstract: An electronic component (1) includes a substrate (2) and at least two piezoelectric resonators (3, 4) each having an active element (6, 9), a lower electrode (5, 8) and an upper electrode (7, 10). The lower electrode (5) of the first resonator (3) is made of a material that is different from that of the lower electrode (8) of the second resonator (4) such that the resonators exhibit different resonance frequencies.Type: GrantFiled: April 1, 2004Date of Patent: February 20, 2007Assignee: STMicroelectronics S.A.Inventors: Guillaume Bouche, Nick Smears, Pascal Ancey, Gregory Caruyer
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Patent number: 7179392Abstract: A process for manufacturing a resonator including the steps of: forming on an insulating substrate a first portion of a conductive material and a second portion of another material on the first portion; forming an insulating layer having its upper surface flush with the upper part of the second portion; forming by a succession of depositions and etchings a beam of a conductive material above the second portion, the beam ends being on the insulating layer on either side of the second portion, the upper surface of the second portion being exposed on either side of the beam, a third portion of a piezoelectric material on the beam and a fourth portion of a conductive material on the third portion above the beam portion located above the second portion; and removing the second portion.Type: GrantFiled: March 5, 2004Date of Patent: February 20, 2007Assignees: STMicroelectronics S.A., Commissariat a l'Energie AtomiqueInventors: Philippe Robert, Grégory Caruyer, Pascal Ancey, Guillaume Bouche
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Publication number: 20060226736Abstract: A support 7 for an acoustic resonator 4 includes at least one bilayer assembly having a layer of high acoustic impedance material 11 and a layer of low acoustic impedance material 12 made of material having a low electrical permittivity.Type: ApplicationFiled: November 27, 2003Publication date: October 12, 2006Inventors: Guillaume Bouche, Gregory Caruyer, Pascal Ancey
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Patent number: 7038355Abstract: A device comprising a resonator formed of a piezoelectric layer sandwiched between two metal electrodes, the resonator being laid on a suspended beam, the device comprising means for deforming said beam by the difference in thermal expansion coefficients.Type: GrantFiled: March 31, 2004Date of Patent: May 2, 2006Assignee: STMicroelectronics SAInventors: Guillaume Bouche, Pascal Ancey, Grégory Caruyer
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Publication number: 20050168104Abstract: Acoustic resonator device (1) includes an active element (6) and a support provided with a membrane (5). The active element (6) is provided with at least one piezoelectric layer (10) and is surmounted by a multilayer stack (12). The multilayer stack (12) is provided with at least three layers, including at least one layer (15) of high acoustic impedance and at least one layer (13) of low acoustic impedance. An integrated circuit including at least one such acoustic resonator device is also disclosed.Type: ApplicationFiled: December 10, 2004Publication date: August 4, 2005Applicant: STMICROELECTRONICS SAInventors: Guillaume Bouche, Gregory Caruyer, Pascal Ancey
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Publication number: 20050028336Abstract: The resonator comprises a piezoelectric layer arranged between two electrodes. An electrical heating resistor is arranged in thermal contact with at least one of the electrodes. Temporary heating of the electrode enables the material constituting the electrode to be partially evaporated, so as to thin the electrode and thus adjust the resonance frequency. Measurement of the resonance frequency in the course of evaporation enables the heating to be interrupted when the required resonance frequency is obtained. One of the electrodes can be arranged on a substrate formed by an acoustic Bragg grating. The resonator can comprise a substrate comprising a cavity whereon one of the electrodes is at least partially arranged.Type: ApplicationFiled: July 6, 2004Publication date: February 10, 2005Applicants: COMMISSARIAT A L'ENERGIE ATOMIQUE, ST MICROELECTRONICS SAInventors: Philippe Robert, Pascal Ancey, Gregory Caruyer
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Publication number: 20050023931Abstract: An acoustic resonator assembly includes a layer of high-acoustic-impedance material and a layer of low-acoustic-impedance material made of a low-electrical-permittivity material. This assembly may support the resonator over an interconnect layer or act as a decoupling assembly between two active elements of the resonator. The assembly may alternatively include three low-acoustic impedance layers. Alternatively, the assembly may include three acoustic impedance layers wherein two of the layers are low acoustic impedance layers and the third layer has a higher acoustic impedance than the first two or alternatively is a high-acoustic impedance layer.Type: ApplicationFiled: June 15, 2004Publication date: February 3, 2005Applicant: STMicroelectronics S.A.Inventors: Guillaume Bouche, Gregory Caruyer, Pascal Ancey
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Publication number: 20050001698Abstract: An electronic component (1) includes a substrate (2) and at least two piezoelectric resonators (3, 4) each having an active element (6, 9), a lower electrode (5, 8) and an upper electrode (7, 10). The lower electrode (5) of the first resonator (3) is made of a material that is different from that of the lower electrode (8) of the second resonator (4) such that the resonators exhibit different resonance frequencies.Type: ApplicationFiled: April 1, 2004Publication date: January 6, 2005Applicant: STMICROELECTRONICS SAInventors: Guillaume Bouche, Nick Smears, Pascal Ancey, Gregory Caruyer