Patents by Inventor Gregory D. Rice

Gregory D. Rice has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas module orifice automated test fixture
    Patent number: 6227035
    Abstract: A test fixture for a laser gas module offers automatic and manual testing for individual gas module components. Check or pressure relief valves are tested with an increasing pressure ramp caused by a metered gas flow into a ballast tank. Metering orifices are tested by measuring pressure change in a known volume tank as gas to or from the tank is directed through the orifice under test. The fixture includes capability to test valve logic and leakages. Test sequence and results are monitored on a computer display showing a schematic representation of both module and fixture. Manual control of module and fixture components is done via a computer graphic interface.
    Type: Grant
    Filed: March 10, 2000
    Date of Patent: May 8, 2001
    Assignee: Cymer, Inc.
    Inventors: Gregory D. Rice, Peter K. Shogren
  • Gas module valve automated test fixture
    Patent number: 6164116
    Abstract: A test fixture for a laser gas module offers automatic and manual testing for individual gas module components. Check or pressure relief valves are tested with an increasing pressure ramp caused by a metered gas flow into a ballast tank. Metering orifices are tested by measuring pressure change in a known volume tank as gas to or from the tank is directed through the orifice under test. The fixture includes capability to test valve logic and leakages. Test sequence and results are monitored on a computer display showing a schematic representation of both module and fixture. Manual control of module and fixture components is done via a computer graphic interface.
    Type: Grant
    Filed: May 6, 1999
    Date of Patent: December 26, 2000
    Assignee: Cymer, Inc.
    Inventors: Gregory D. Rice, Peter K. Shogren