Abstract: Spatial light modulators (SLMs) and systems using same are described. Generally, the system includes a laser, a fixture holding a workpiece to be processed using the laser, illumination optics to illuminate the SLM with laser light, imaging optics to focus modulated light from the SLM onto the workpiece, and a controller to control the laser, the SLM, imaging optics and the fixture to scan the modulated light across a workpiece surface. The SLM includes an array of microelectromechanical system based diffractors, each including an electrostatically deflectable member coupled to a first light reflective surface and to bring light reflected from the first light reflective surface into interference with light reflected from a second light reflective surface in the SLM. The controller is operable to provide analog gray-scale control of an intensity of modulated light reflected from each diffractor by controlling an electrostatic force generated by a driver coupled thereto.

Abstract: A low profile side-emitting lens for an LED die has two tiers of different waveguides radially extending out from a center side-emitting lens. An LED emits light into the center side-emitting lens, which has a curved surface that internally reflects the LED light outward approximately parallel to the top surface of the LED die. The center lens has a height of 2 mm, required for reflecting the LED light outward. Radially extending from the periphery of the bottom half of the center lens is a bottom tier of waveguides, each having a height of 1 mm, and radially extending from the periphery of the top half of the center lens is a top tier of waveguides, each having a height of 1 mm. The light output areas of the top and bottom tiers of waveguides are parallel with each other so that the 2 mm high side emission is reduced to a 1 mm side emission without reducing the emission area.

Abstract: A low profile side-emitting lens for an LED die has two tiers of different waveguides radially extending out from a center side-emitting lens. An LED emits light into the center side-emitting lens, which has a curved surface that internally reflects the LED light outward approximately parallel to the top surface of the LED die. The center lens has a height of 2 mm, required for reflecting the LED light outward. Radially extending from the periphery of the bottom half of the center lens is a bottom tier of waveguides, each having a height of 1 mm, and radially extending from the periphery of the top half of the center lens is a top tier of waveguides, each having a height of 1 mm. The light output areas of the top and bottom tiers of waveguides are parallel with each other so that the 2 mm high side emission is reduced to a 1 mm side emission without reducing the emission area.

Abstract: Collection optics are used with one or more light emitting diodes to produce, e.g., collimated light. The collection optics are produced in multiple pieces including a small reflective ring that surrounds the one or more light emitting diodes. The reflective ring may be positioned relative to the LEDs, using a mesa upon which the LEDs are mounted, as a lateral positioning guide. A separate upper reflector uses the reflective ring as a lateral positioning guide during assembly. The reflective ring and the upper reflector include reflective sidewalls that are approximately continuous when the reflective ring and upper reflector are assembled.