Patents by Inventor Gregory J. Light

Gregory J. Light has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of forming isolation structures, and methods of forming nonvolatile memory
    Patent number: 8030170
    Abstract: Some embodiments include methods of forming isolation structures. A trench may be formed to extend into a semiconductor material. Polysilazane may be formed within the trench, and then exposed to steam. A maximum temperature of the polysilazane during the steam exposure may be less than or equal to about 500° C. The steam exposure may convert all of the polysilazane to silicon oxide. The silicon oxide may be annealed under an inert atmosphere. A maximum temperature of the silicon oxide during the annealing may be from about 700° C. to about 1000° C. In some embodiments, the isolation structures are utilized to isolate nonvolatile memory components from one another.
    Type: Grant
    Filed: December 8, 2009
    Date of Patent: October 4, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Yunjun Ho, Matt Meyers, Kevin L. Beaman, Gregory J. Light
  • Methods Of Forming Isolation Structures, And Methods Of Forming Nonvolatile Memory
    Publication number: 20110136319
    Abstract: Some embodiments include methods of forming isolation structures. A trench may be formed to extend into a semiconductor material. Polysilazane may be formed within the trench, and then exposed to steam. A maximum temperature of the polysilazane during the steam exposure may be less than or equal to about 500° C. The steam exposure may convert all of the polysilazane to silicon oxide. The silicon oxide may be annealed under an inert atmosphere. A maximum temperature of the silicon oxide during the annealing may be from about 700° C. to about 1000° C. In some embodiments, the isolation structures are utilized to isolate nonvolatile memory components from one another.
    Type: Application
    Filed: December 8, 2009
    Publication date: June 9, 2011
    Inventors: Yunjun Ho, Matt Meyers, Kevin L. Beaman, Gregory J. Light