Abstract: An apparatus includes a substrate holder, a first actuator to rotate the substrate holder, a second actuator to move the substrate holder linearly, a first sensor to generate one or more first measurements or images of the substrate, a second sensor to generate one or more second measurements of target positions on the substrate, and a processing device. The processing device estimates a position of the substrate on the substrate holder and causes the first actuator to rotate the substrate holder about a first axis. The rotation causes an offset between a field of view of the second sensor and a target position on the substrate due to the substrate not being centered on the substrate holder. The processing device causes the second actuator to move the substrate holder linearly along a second axis to correct the offset. The processing device determines a profile across a surface of the substrate based on the one or more second measurements of the target positions.

Abstract: An optical measurement device comprises a substrate holder to secure a substrate, a plurality of actuators to move the substrate holder relative to a plurality of axes, a first sensor to generate one or more first measurements or images of a first plurality of target positions on the substrate, and a second sensor to generate one or more second measurements of a second plurality of target positions on the substrate. The optical measurement device further comprises a plate, wherein the substrate holder, the plurality of actuators, the first sensor and the second sensor are each mounted to the plate, and wherein the plate provides vibration isolation from a factory interface to which the optical measurement device mounts. The optical measurement device further comprises a processing device that executes instructions to control the plurality of actuators and process the first measurements or images and the second measurements.

Abstract: An apparatus includes a substrate holder, a first actuator to rotate the substrate holder, a second actuator to move the substrate holder linearly, a first sensor to generate one or more first measurements or images of the substrate, a second sensor to generate one or more second measurements of target positions on the substrate, and a processing device. The processing device estimates a position of the substrate on the substrate holder and causes the first actuator to rotate the substrate holder about a first axis. The rotation causes an offset between a field of view of the second sensor and a target position on the substrate due to the substrate not being centered on the substrate holder. The processing device causes the second actuator to move the substrate holder linearly along a second axis to correct the offset. The processing device determines a profile across a surface of the substrate based on the one or more second measurements of the target positions.

Abstract: A system includes a robot with a robot arm having multiple joints and an end effector to carry a substrate. A processing device is to build, with respect to a joint space for the multiple joints and the end effector, a graph of reachable positions and sub-paths between the reachable positions, wherein the reachable positions and the sub-paths satisfy Cartesian limits within the joint space. The processing device is to determine, by executing a graph optimization algorithm on the graph, multiple paths, each made up of a group of the sub-paths and having one of a shortest distance or a lowest cost between a start point and an end point of the end effector. The processing device is to select a path, of the multiple paths, through the graph that minimizes a move time of the end effector between the start point and the end point.

Abstract: A system includes a robot with a robot arm having multiple joints and an end effector to carry a substrate. A processing device is to build, with respect to a joint space for the multiple joints and the end effector, a graph of reachable positions and sub-paths between the reachable positions, wherein the reachable positions and the sub-paths satisfy Cartesian limits within the joint space. The processing device is to determine, by executing a graph optimization algorithm on the graph, multiple paths, each made up of a group of the sub-paths and having one of a shortest distance or a lowest cost between a start point and an end point of the end effector. The processing device is to select a path, of the multiple paths, through the graph that minimizes a move time of the end effector between the start point and the end point.

Abstract: A system includes a robot arm with multiple joints and one or more end effector to carry a substrate. A processing device determines, within joint space of the robot arm, start/end points of the one or more end effector for a complete movement. The processing device builds, in joint space for the multiple joints and the one or more end effector, a graph of reachable positions and sub-paths between the reachable positions that satisfy Cartesian limits. The reachable positions are identified at a granularity that divides the complete movement into multiple sub-movements. The processing device executes a graph optimization algorithm on the graph to determine multiple paths, each a group of the sub-paths, that have one of shortest distances or lowest costs between the start/end points, and selects a path thereof that minimizes move time of the one or more end effector between the start/end points.

Abstract: A system includes a robot arm with multiple joints and one or more end effector to carry a substrate. A processing device determines, within joint space of the robot arm, start/end points of the one or more end effector for a complete movement. The processing device builds, in joint space for the multiple joints and the one or more end effector, a graph of reachable positions and sub-paths between the reachable positions that satisfy Cartesian limits. The reachable positions are identified at a granularity that divides the complete movement into multiple sub-movements. The processing device executes a graph optimization algorithm on the graph to determine multiple paths, each a group of the sub-paths, that have one of shortest distances or lowest costs between the start/end points, and selects a path thereof that minimizes move time of the one or more end effector between the start/end points.

Abstract: A method and apparatus for of improving processing results in a processing chamber by orienting a substrate support relative to a surface within the processing chamber. The method comprising orienting a supporting surface of a substrate support in a first orientation relative to an output surface of a showerhead, where the first orientation of the supporting surface relative to the output surface is not coplanar, and depositing a first layer of material on a substrate disposed on the supporting surface that is oriented in the first orientation.

Abstract: A method and apparatus for of improving processing results in a processing chamber by orienting a substrate support relative to a surface within the processing chamber.

Abstract: A method and apparatus for of improving processing results in a processing chamber by orienting a substrate support relative to a surface within the processing chamber. The method comprising orienting a supporting surface of a substrate support in a first orientation relative to an output surface of a showerhead, where the first orientation of the supporting surface relative to the output surface is not coplanar, and depositing a first layer of material on a substrate disposed on the supporting surface that is oriented in the first orientation.

Abstract: A method and apparatus for of improving processing results in a processing chamber by orienting a substrate support relative to a surface within the processing chamber.