Patents by Inventor Gregory McGraw

Gregory McGraw has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11946131
    Abstract: Designs and arrangements for sublimation cells are provided, which enriches an inert carrier gas with organic vapor such that the partial pressure of the organic vapor is highly stable in time. Stability is achieved by controlling the local rates of evaporation along the solid-gas interface through one or more crucibles, thereby reducing the effects of greater headspace and lowering interfacial area as the source depletes. Local evaporation rates also can be controlled using either temperature distribution or convective flow fields.
    Type: Grant
    Filed: May 17, 2018
    Date of Patent: April 2, 2024
    Assignee: Universal Display Corporation
    Inventors: Gregory McGraw, Edwin Van Den Tillaart, William E. Quinn, Sven Pekelder, Matthew King
  • Publication number: 20240052474
    Abstract: Devices suitable for use in OVJP and similar deposition techniques are provided that include multiple delivery apertures that are uncoupled from one another, allowing for more plateau-like deposition profiles. Fabrication techniques for such devices are also provided in which multiple wafers are etched and laminated to one another to form a monolithic depositor block.
    Type: Application
    Filed: August 1, 2023
    Publication date: February 15, 2024
    Inventors: William E. QUINN, Gregory MCGRAW, Craig Anthony OUTTEN, Roman KOROTKOV, Seckin GOKALTUN
  • Publication number: 20230357918
    Abstract: Methods, systems, and devices are provided for organic vapor jet deposition (OVJP), which require significantly fewer print heads than conventional OVJP deposition systems. The disclosed OVJP systems include half the number of OVJP print heads than a conventional system, or less, and provide for relative movement of the substrate and print heads to allow for rapid and comprehensive material deposition over the full surface of the substrate.
    Type: Application
    Filed: May 3, 2023
    Publication date: November 9, 2023
    Inventors: Jeff HAWTHORNE, William E. QUINN, Kent Khuong NGUYEN, Sriram KRISHNASWAMI, Gregory McGRAW, Daniel TOET
  • Patent number: 11793059
    Abstract: Techniques and devices are provided for attaching a die to a metal manifold. A metal-containing ink is used to deposit a metal trace on the die and thereby to form a gasket, after which the die is compressed against the manifold to form a sealed connection between the two.
    Type: Grant
    Filed: August 5, 2021
    Date of Patent: October 17, 2023
    Assignee: Universal Display Corporation
    Inventors: William E. Quinn, Jason Paynter, Gregory McGraw, Matthew King
  • Patent number: 11778889
    Abstract: Embodiments of the disclosed subject matter provide a device having a print head that includes a micronozzle array of depositors to deposit a material on a substrate. A reflective optical device may reflect a signal output by at least one optical sensor, and to reflect the signal from a surface of the substrate to the optical sensor. A processor may determine a distance between the optical sensor and the target surface of the substrate. The device may include one or more actuators coupled to the at least one print head to move the print head relative to an internal reference frame and adjust a position of the print head to the substrate. The sensor may be fixedly coupled with a mount to the internal reference frame. The print head may be configured to move independently of the optical sensor in at least one axis of linear or rotational motion.
    Type: Grant
    Filed: June 29, 2021
    Date of Patent: October 3, 2023
    Assignee: Universal Display Corporation
    Inventors: Matthew King, Gregg Kottas, Igor Kozin, Gregory McGraw, William E. Quinn
  • Patent number: 11761076
    Abstract: A microfluidic device for use with a microfluidic delivery system, such as an organic vapor jet printing device, includes a glass layer that is directly bonded to a microfabricated die and a metal plate via a double anodic bond. The double anodic bond is formed by forming a first anodic bond at an interface of the microfabricated die and the glass layer, and forming a second anodic bond at an interface of the metal plate and the glass layer, where the second anodic bond is formed using a voltage that is lower than the voltage used to form the first anodic bond. The second anodic bond is formed with the polarity of the voltage reversed with respect to the glass layer and the formation of the first anodic bond. The metal plate includes attachment features that allow removal of the microfluidic device from a fixture.
    Type: Grant
    Filed: May 3, 2021
    Date of Patent: September 19, 2023
    Assignee: The Regents of the University of Michigan
    Inventors: Stephen Forrest, Gregory McGraw, Siddharth Harikrishna Mohan, Diane L. Peters
  • Patent number: 11751468
    Abstract: Methods and devices for controlling pressures in microenvironments between a deposition apparatus and a substrate are provided. Each microenvironment is associated with an aperture of the deposition apparatus which can allow for control of the microenvironment.
    Type: Grant
    Filed: July 20, 2021
    Date of Patent: September 5, 2023
    Assignee: Universal Display Corporation
    Inventors: William E. Quinn, Siddharth Harikrishna Mohan, Gregory McGraw, Xin Xu
  • Patent number: 11751466
    Abstract: Embodiments of the disclosed subject matter provide an apparatus having a device with a micronozzle array disposed on a micro-fabricated fluidic die. The device may include a first gas distribution plate and a second opposing plate, where the micro-fabricated fluidic die is disposed between the first gas distribution plate and the second opposing plate, wherein the first gas distribution plate is irreversibly joined to the micronozzle array with a seal that is gas-tight, and where the first gas distribution plate includes a plurality of sealed flow paths. A manifold may be reversibly joined to the first gas distribution plate, where the micro-fabricated fluidic die and the first gas distribution plate and the second opposing plate are disposed between the manifold. A thermally conductive plate may have at least one window that provides a clearance fit for the device across a range of motion relative to the thermally conductive plate.
    Type: Grant
    Filed: April 7, 2021
    Date of Patent: September 5, 2023
    Assignee: Universal Display Corporation
    Inventors: Matthew King, Gregg Kottas, Gregory McGraw, William E. Quinn
  • Patent number: 11746408
    Abstract: Embodiments of the disclosed subject matter provide a vapor distribution manifold that ejects organic vapor laden gas into a chamber and withdraws chamber gas, where vapor ejected from the manifold is incident on, and condenses onto, a deposition surface within the chamber that moves relative to one or more print heads in a direction orthogonal to a platen normal and a linear extent of the manifold. The volumetric flow of gas withdrawn by the manifold from the chamber may be greater than the volumetric flow of gas injected into the chamber by the manifold. The net outflow of gas from the chamber through the manifold may prevent organic vapor from diffusing beyond the extent of the gap between the manifold and deposition surface. The manifold may be configured so that long axes of delivery and exhaust apertures are perpendicular to a print direction.
    Type: Grant
    Filed: July 30, 2021
    Date of Patent: September 5, 2023
    Assignee: Universal Display Corporation
    Inventors: William E. Quinn, Gregory Mcgraw, Matthew King, Gregg Kottas
  • Publication number: 20230269994
    Abstract: Implementations of the disclosed subject matter provide an organic vapor jet print die including a linear array of depositors, with each of the depositors having a cluster of apertures. The organic vapor jet print die may include at least one first aperture in each cluster of apertures is a delivery aperture that is in fluid communication with a carrier gas source and an evaporation oven. At least one second aperture in each cluster of apertures may be an exhaust aperture in fluid communication with a vacuum reservoir with a static pressure lower than that at the apertures. The delivery apertures and exhaust apertures may have a uniformity that is less than 0.4%.
    Type: Application
    Filed: February 1, 2023
    Publication date: August 24, 2023
    Inventors: William E. QUINN, Gregory MCGRAW, Roman KOROTKOV, Craig Anthony OUTTEN
  • Publication number: 20230232697
    Abstract: Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.
    Type: Application
    Filed: January 31, 2023
    Publication date: July 20, 2023
    Inventors: William E. QUINN, Gregory MCGRAW, Gregg KOTTAS, Xin XU, Julia J. BROWN
  • Patent number: 11683973
    Abstract: Embodiments of the disclosed subject matter provide a device including a carrier plate, and a die including a mating surface with a patterned thin film of metal or metal oxide surface bonded to the carrier plate using a solder preform with voids that overlay the patterned thin film on the die, where the oxide surface is disposed opposite a moat in a mating surface of the carrier plate, and where the voided regions remain free of solder when the solder is reflowed.
    Type: Grant
    Filed: January 31, 2020
    Date of Patent: June 20, 2023
    Assignee: Universal Display Corporation
    Inventors: Gregory McGraw, William E. Quinn, Steven Buswell
  • Publication number: 20230183852
    Abstract: Embodiments of the disclosed subject matter provide methods and systems including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel, and an actuator to adjust a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target. The adjustment of the fly height separation may stop and/or start the deposition of the material from the nozzle.
    Type: Application
    Filed: December 15, 2022
    Publication date: June 15, 2023
    Inventors: Gregory McGRAW, William E. QUINN, Matthew KING, Elliot H. HARTFORD, JR., Siddharth HARIKRISHNA MOHAN, Benjamin SWEDLOVE, Gregg KOTTAS
  • Publication number: 20230189626
    Abstract: Devices for deposition of material via organic vapor jet printing (OVJP) and similar techniques are provided. The depositor includes delivery channels ending in delivery apertures, where the delivery channels are flared as they approach the delivery apertures, and/or have a trapezoidal shape. The depositors are suitable for fabricating OLEDs and OLED components and similar devices.
    Type: Application
    Filed: January 25, 2023
    Publication date: June 15, 2023
    Inventors: Gregory MCGRAW, William E. QUINN, Gregg KOTTAS, Matthew KING, Benjamin SWEDLOVE, Tomasz TROJACKI
  • Publication number: 20230151491
    Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.
    Type: Application
    Filed: January 20, 2023
    Publication date: May 18, 2023
    Inventors: Gregory MCGRAW, William E. QUINN, Gregg KOTTAS, Siddharth HARIKRISHNA MOHAN, Matthew KING
  • Publication number: 20230112871
    Abstract: Embodiments of the disclosed subject matter provide a device having a substrate, and a plurality of unit areas of an organic light emitting diode (OLED) display disposed on the substrate. The unit areas may be repeating, area-filling subdivisions on the substrate that each have an anode and a cathode. The organic film may be disposed over portions of the device other than the unit areas. The device may include at least one pixel having a plurality of sub-pixels disposed within each of the plurality of unit areas. The cathode of at least one pixel of each of the plurality of unit areas may be a common cathode.
    Type: Application
    Filed: December 13, 2022
    Publication date: April 13, 2023
    Inventors: Xin XU, Gregory MCGRAW, William E. QUINN, Gregg KOTTAS, Jason PAYNTER, Julia J. BROWN
  • Patent number: 11600777
    Abstract: Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.
    Type: Grant
    Filed: August 20, 2021
    Date of Patent: March 7, 2023
    Assignee: Universal Display Corporation
    Inventors: William E. Quinn, Gregory McGraw, Gregg Kottas, Xin Xu, Julia J. Brown
  • Publication number: 20230063757
    Abstract: An organic vapor jet printing (OVJP) device is provided that includes an OVJP print head having a nozzle configured to eject an organic material entrained in a carrier gas, one or more heaters to heat the nozzle, and one or more heat sinks to remove heat from the region of the nozzle. OVJP deposition devices and techniques are also provided in which heat sinks are arranged in the region of one or more OVJP nozzle, which maintain an ambient temperature of not more than 40 C. when the print head is operated at an operating temperature of 450 C.
    Type: Application
    Filed: August 3, 2022
    Publication date: March 2, 2023
    Inventors: William E. QUINN, Craig Anthony OUTTEN, Gregory MCGRAW, Kent Khuong NGUYEN, Steven Shigeki AOCHI, Neil D. NGUYEN, David SMILEY, Michael FILIPPI
  • Patent number: 11591686
    Abstract: Methods of modulating flow during vapor jet deposition of organic materials are provided. A method may include ejecting a vapor entrained in a delivery gas from a nozzle onto a substrate upon which the vapor condenses. A confinement gas may be provided that has a flow direction opposing a flow direction of the delivery gas ejected from the nozzle. A vacuum source may be provided that is adjacent to a delivery gas aperture of the nozzle. The method may include adjusting, by an actuator, a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target.
    Type: Grant
    Filed: October 28, 2020
    Date of Patent: February 28, 2023
    Assignee: Universal Display Corporation
    Inventors: Gregory McGraw, William E. Quinn, Matthew King, Elliot H. Hartford, Jr., Siddharth Harikrishna Mohan, Benjamin Swedlove, Gregg Kottas
  • Patent number: 11588140
    Abstract: Devices for deposition of material via organic vapor jet printing (OVJP) and similar techniques are provided. The depositor includes delivery channels ending in delivery apertures, where the delivery channels are flared as they approach the delivery apertures, and/or have a trapezoidal shape. The depositors are suitable for fabricating OLEDs and OLED components and similar devices.
    Type: Grant
    Filed: January 11, 2019
    Date of Patent: February 21, 2023
    Assignee: Universal Display Corporation
    Inventors: Gregory McGraw, William E. Quinn, Gregg Kottas, Matthew King, Benjamin Swedlove, Tomasz Trojacki