Patents by Inventor Gregory S. Boettcher

Gregory S. Boettcher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Emergency machine off feature with safety control interface
    Patent number: 7847683
    Abstract: An apparatus for implementing an emergency machine off circuit of a fabrication system, includes: at least one safety switch adapted for shunting an operation enable signal from a piece of equipment selected for removal from service, the switch also removing from service supplemental devices for the selected equipment. A semiconductor fabrication system and a method for removing equipment from service are provided.
    Type: Grant
    Filed: September 12, 2007
    Date of Patent: December 7, 2010
    Assignee: International Business Machines Corporation
    Inventors: Gregory S. Boettcher, William R. Copeland, Joseph P. DeGeorge, Scott M. Hargash, William T. Petry, Robert R. Young
  • EMERGENCY MACHINE OFF FEATURE WITH SAFETY CONTROL INTERFACE
    Publication number: 20090066502
    Abstract: An apparatus for implementing an emergency machine off circuit of a fabrication system, includes: at least one safety switch adapted for shunting an operation enable signal from a piece of equipment selected for removal from service, the switch also removing from service supplemental devices for the selected equipment. A semiconductor fabrication system and a method for removing equipment from service are provided.
    Type: Application
    Filed: September 12, 2007
    Publication date: March 12, 2009
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Gregory S. Boettcher, William R. Copeland, Joseph P. DeGeorge, Scott M. Hargash, William T. Petry, Robert R. Young, JR.
  • In-situ wear indicator for non-selective material removal systems
    Patent number: 6957622
    Abstract: An in-situ wear indicator for detecting wear to at least one selected part in a semiconductor manufacturing environment. The indicator is manufactured in a selected material with a selected thickness so that the indicator degrades upon exposure to the semiconductor manufacturing process at a fixed rate relative to the wear of the selected part. The indicator displays a visual indication of wear which is discernible by an automated detection device.
    Type: Grant
    Filed: February 5, 2004
    Date of Patent: October 25, 2005
    Assignee: International Business Machiens Corporation
    Inventors: Gregory S. Boettcher, Steven B. Gold, Robert P. Katz, Gabriel V. Moore
  • Semiconductor arrangement preventing damage during contact processing
    Patent number: 6188124
    Abstract: A semiconductor arrangement having a first active region and a dummy region on a surface of a substrate. The first active region and the dummy region are spaced from one another without any contact, and the dummy region is closer to an edge of the surface of the substrate in comparison to the first active region. Formed on the dummy region, first active region, and a portion of the substrate surface is a dielectric layer. The surface of the dielectric layer has an inactive portion and an active portion. A mask is disposed on the dielectric layer such that the mask contacts the inactive portion and does not contact the active portion.
    Type: Grant
    Filed: July 14, 1999
    Date of Patent: February 13, 2001
    Assignee: International Business Machines Corporation
    Inventors: Gregory S. Boettcher, Robert P. Katz, Ashwani K. Malhotra, James Wood