Patents by Inventor Gregory Thomes

Gregory Thomes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Nozzle design for generating fluid streams useful in the manufacture of microelectronic devices
    Publication number: 20060105683
    Abstract: Improved nozzle design that discharges fluid streams through a series of nozzle orifices distributed along a length of the nozzle. The present invention may be incorporated into a wide range of microelectronic device manufacturing processes and equipment types for which an array of process streams are desired for treating microelectronic workpieces. The present invention is particularly useful to cryogenically clean microelectronic workpieces.
    Type: Application
    Filed: November 8, 2005
    Publication date: May 18, 2006
    Inventors: James Weygand, Pamela Kunkel, Gregory Thomes