Patents by Inventor Greja J. A. M. Verhelijden

Greja J. A. M. Verhelijden has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MEMS devices
    Patent number: 8481365
    Abstract: A method of manufacturing a MEMS device comprises forming a MEMS device element (14). A sacrificial layer (20) is provided over the device element and a package cover layer (22) is provided over the sacrificial layer. The sacrificial layer is removed using at least one opening (22) in the cover layer and the at least one opening (24) is sealed by an anneal process.
    Type: Grant
    Filed: May 19, 2009
    Date of Patent: July 9, 2013
    Assignee: NXP B.V.
    Inventors: Greja J. A. M. Verhelijden, Philippe Meunier-Beillard, Johannes J. T. M. Donkers
  • MEMS DEVICES
    Publication number: 20110198746
    Abstract: A method of manufacturing a MEMS device comprises forming a MEMS device element (14). A sacrificial layer (20) is provided over the device element and a package cover layer (22) is provided over the sacrificial layer. The sacrificial layer is removed using at least one opening (22) in the cover layer and the at least one opening (24) is sealed by an anneal process.
    Type: Application
    Filed: May 19, 2009
    Publication date: August 18, 2011
    Applicant: NXP B.V.
    Inventors: Greja J. A. M. Verhelijden, Philippe Meunier-Beillard, Johannes J. T. M. Donkers