Patents by Inventor Grigory VAZHENIN

Grigory VAZHENIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11091849
    Abstract: An aqueous bath for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy, the bath comprising a source of nickel ions, and optionally a source of ions of at least one alloying metal, at least one buffering agent, at least one of a dimer of a compound of formula (I) or mixtures thereof wherein R1 is a substituted or unsubstituted alkenyl group, R2 may be present or not, and if present R2 is a —(CH2)n—SO3? group, wherein n is an integer in the range of 1-6, and wherein one or more of the hydrogens in the group may be replaced by a substituent, preferably hydroxide; and a method for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy with said aqueous bath.
    Type: Grant
    Filed: September 13, 2018
    Date of Patent: August 17, 2021
    Assignee: Atotech Deutschland GmbH
    Inventors: Josef Gaida, Jan Sperling, Mauro Castellani, Grigory Vazhenin, Stefanie Ackermann, Heiko Brunner, Dirk Rohde
  • Publication number: 20200392637
    Abstract: An aqueous indium or indium alloy plating bath comprising a source of indium ions, an acid, a source of halide ions, a surfactant according to formula (I) wherein A is selected from branched or unbranched C10-C15-alkyl; B is selected from the group consisting of hydrogen and alkyl; m is an integer ranging from 5 to 25; each R is independently from each other selected from hydrogen and methyl; and a dihydroxybenzene derivative according to formula (II) wherein each X is independently selected from fluorine, chlorine, bromine, iodine, alkoxy, and nitro; n is an integer ranging from 1 to 4, wherein, when the aqueous indium or indium alloy plating bath is an indium alloy plating bath, an alloying reducible metal is selected from the group consisting of aluminum, bismuth, copper, gold, lead, nickel, silver, tin, tungsten and zinc.
    Type: Application
    Filed: August 28, 2020
    Publication date: December 17, 2020
    Inventors: Jan SPERLING, Stefan PIEPER, Grigory VAZHENIN, Mauro CASTELLANI, Andreas KIRBS, Dirk ROHDE
  • Patent number: 10793962
    Abstract: An aqueous indium or indium alloy plating bath comprising a source of indium ions, an acid, a source of halide ions, a surfactant according to formula (I) wherein A is selected from branched or unbranched C10-C15-alkyl; B is selected from the group consisting of hydrogen and alkyl; m is an integer ranging from 5 to 25; each R is independently from each other selected from hydrogen and methyl; and a dihydroxybenzene derivative according to formula (II) wherein each X is independently selected from fluorine, chlorine, bromine, iodine, alkoxy, and nitro; n is an integer ranging from 1 to 4, and a process for deposition of indium or an indium alloy wherein the disclosed bath is used.
    Type: Grant
    Filed: January 25, 2017
    Date of Patent: October 6, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Jan Sperling, Stefan Pieper, Grigory Vazhenin, Mauro Castellani, Andreas Kirbs, Dirk Rohde
  • Patent number: 10753007
    Abstract: The present invention deals with a process for deposition of indium or indium alloys and an article obtained by the process, wherein the process includes the steps i. providing a substrate having at least one metal or metal alloy surface; ii. depositing a first indium or indium alloy layer on at least one portion of said surface whereby a composed phase layer is formed of a part of the metal or metal alloy surface and a part of the first indium or indium alloy layer; iii. removing partially or wholly the part of the first indium or indium alloy layer which has not been formed into the composed phase layer; iv. depositing a second indium or indium alloy layer on the at least one portion of the surface obtained in step iii.
    Type: Grant
    Filed: October 4, 2016
    Date of Patent: August 25, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Grigory Vazhenin, Jan Sperling, Stefan Pieper, Mauro Castellani, Andreas Kirbs, Dirk Rohde
  • Publication number: 20200199766
    Abstract: An aqueous bath for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy, the bath comprising a source of nickel ions, and optionally a source of ions of at least one alloying metal, at least one buffering agent, at least one of a dimer of a compound of formula (I) or mixtures thereof wherein R1 is a substituted or unsubstituted alkenyl group, R2 may be present or not, and if present R2 is a —(CH2)n-SO3? group, wherein n is an integer in the range of 1-6, and wherein one or more of the hydrogens in the group may be replaced by a substituent, preferably hydroxide; and a method for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy with said aqueous bath.
    Type: Application
    Filed: September 13, 2018
    Publication date: June 25, 2020
    Inventors: Josef GAIDA, Jan SPERLING, Mauro CASTELLANI, Grigory VAZHENIN, Stefanie ACKERMANN, Heiko BRUNNER, Dirk ROHDE
  • Publication number: 20180355500
    Abstract: An aqueous indium or indium alloy plating bath comprising a source of indium ions, an acid, a source of halide ions, a surfactant according to formula (I) wherein A is selected from branched or unbranched C10-C15-alkyl; B is selected from the group consisting of hydrogen and alkyl; m is an integer ranging from 5 to 25; each R is independently from each other selected from hydrogen and methyl; and a dihydroxybenzene derivative according to formula (II) wherein each X is independently selected from fluorine, chlorine, bromine, iodine, alkoxy, and nitro; n is an integer ranging from 1 to 4, and a process for deposition of indium or an indium alloy wherein said bath is used.
    Type: Application
    Filed: January 25, 2017
    Publication date: December 13, 2018
    Inventors: Jan SPERLING, Stefan PIEPER, Grigory VAZHENIN, Mauro CASTELLANI, Andreas KIRBS, Dirk ROHDE
  • Publication number: 20180298511
    Abstract: The present invention deals with a process for deposition of indium or indium alloys and an article obtained by the process, wherein the process includes the steps i. providing a substrate having at least one metal or metal alloy surface; ii. depositing a first indium or indium alloy layer on at least one portion of said surface whereby a composed phase layer is formed of a part of the metal or metal alloy surface and a part of the first indium or indium alloy layer; iii. removing partially or wholly the part of the first indium or indium alloy layer which has not been formed into the composed phase layer; iv. depositing a second indium or indium alloy layer on the at least one portion of the surface obtained in step iii. v.
    Type: Application
    Filed: October 4, 2016
    Publication date: October 18, 2018
    Inventors: Grigory VAZHENIN, Jan SPERLING, Stefan PIEPER, Mauro CASTELLANI, Andreas KIRBS, Dirk ROHDE