Abstract: An inspection system and method are disclosed. The inspection system may include a controller configured to be communicatively coupled to an optical sub-system. The controller may include one or more processors configured to execute program instructions to cause the one or more processors to direct a stage to perform a first scanning of a sample using a first configuration of a beam-shaping channel, where the first configuration controls an orientation of a beam profile of an illumination beam as projected onto the sample; receive first scan data associated with the first scanning; direct the stage to perform a second scanning using a second configuration of the beam-shaping channel; receive second scan data associated with the second scanning; and identify one or more defects on the sample based on scan data from at least the first and second scans. The stage may include an X-Y ? stage.