Patents by Inventor Guan-Shian Chen

Guan-Shian Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Modular electrochemical processing system
    Publication number: 20040154535
    Abstract: Embodiments of the invention generally provide a substrate processing system and method. The substrate processing system generally includes two primary components. The first component is an interface section having at least one first substrate transfer robot positioned therein, and the second component is at least one processing module in communication with the interface section, the at least one processing module having a pretreatment and post treatment cell, a processing cell, at a second substrate transfer robot positioned therein. The substrate processing method generally includes transporting a dry substrate to a processing module via a dry interface. Once the substrate is positioned in the processing module, a robot transfers the substrate between a treatment cell and a processing cell contained within the processing module to complete a predetermined sequence of processing steps.
    Type: Application
    Filed: February 3, 2004
    Publication date: August 12, 2004
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Guan-Shian Chen, Michael X. Yang
  • Modular electrochemical processing system
    Patent number: 6699380
    Abstract: Embodiments of the invention generally provide a substrate processing system and method. The substrate processing system generally includes two primary components. The first component is an interface section having at least one first substrate transfer robot positioned therein, and the second component is at least one processing module in communication with the interface section, the at least one processing module having a pretreatment and post treatment cell, a processing cell, at a second substrate transfer robot positioned therein. The substrate processing method generally includes transporting a dry substrate to a processing module via a dry interface. Once the substrate is positioned in the processing module, a robot transfers the substrate between a treatment cell and a processing cell contained within the processing module to complete a predetermined sequence of processing steps.
    Type: Grant
    Filed: October 18, 2002
    Date of Patent: March 2, 2004
    Assignee: Applied Materials Inc.
    Inventors: Guan-Shian Chen, Michael X. Yang