Patents by Inventor Guanchen He

Guanchen He has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND METHOD FOR ALIGNING INTEGRATED CIRCUIT LAYERS USING MULTIPLE GRATING MATERIALS
    Publication number: 20200152498
    Abstract: Embodiments of the disclosure provides an apparatus for aligning layers of an integrated circuit (IC), the apparatus including: an insulator layer positioned above a semiconductor substrate; a first diffraction grating within a first region of the insulator layer, the first diffraction grating including a first grating material within the first region of the insulator layer; and a second diffraction grating within a second region of the insulator layer, the second grating including a second grating material within the second region of the insulator layer, wherein the second grating material is different from the first grating material, and wherein an optical contrast between the first and second grating materials is greater than an optical contrast between the second grating material and the insulator layer.
    Type: Application
    Filed: November 13, 2018
    Publication date: May 14, 2020
    Inventors: Dongyue Yang, Keith H. Tabakman, Guanchen He, Xintuo Dai, Xueli Hao
  • Apparatus and method for aligning integrated circuit layers using multiple grating materials
    Patent number: 10635007
    Abstract: Embodiments of the disclosure provides an apparatus for aligning layers of an integrated circuit (IC), the apparatus including: an insulator layer positioned above a semiconductor substrate; a first diffraction grating within a first region of the insulator layer, the first diffraction grating including a first grating material within the first region of the insulator layer; and a second diffraction grating within a second region of the insulator layer, the second grating including a second grating material within the second region of the insulator layer, wherein the second grating material is different from the first grating material, and wherein an optical contrast between the first and second grating materials is greater than an optical contrast between the second grating material and the insulator layer.
    Type: Grant
    Filed: November 13, 2018
    Date of Patent: April 28, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Dongyue Yang, Keith H. Tabakman, Guanchen He, Xintuo Dai, Xueli Hao