Patents by Inventor Guanghong Luo

Guanghong Luo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8404129
    Abstract: A method and system for fabricating an optical component are described. The method and system include providing a first planarization stopping and a second planarization stopping structure. The first planarization stopping structure has a first height and a first edge. The second planarization stopping structure has a second height different from the first height and a second edge. The first edge is separated from the second edge by a distance. The method and system also include providing an optical material. The optical material resides at least between the first edge of the first planarization stopping structure and the second edge of the second planarization stopping structure. The method and system also include planarizing the optical components. The planarization removes a portion of the optical material to form a surface between the first planarization stopping structure and the second planarization stopping structure. This surface has a curvature.
    Type: Grant
    Filed: March 31, 2010
    Date of Patent: March 26, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Guanghong Luo, Danning Yang, Ming Jiang
  • Patent number: 8375564
    Abstract: A method provides a pole of magnetic recording transducer. A nonmagnetic stop layer having a thickness and a top surface is provided. A depression that forms a bevel is provided in the stop layer. The bevel has a depth less than the thickness and a bevel angle with respect to a remaining portion of the top surface. The bevel angle is greater than zero and less than ninety degrees. An intermediate layer having a substantially flat top surface is provided over the stop layer. A trench is formed in the intermediate layer via a removal process. The trench has a profile corresponding to the pole. The stop layer is a stop for the removal process. The method also includes providing the pole in the trench. The pole has a leading edge bevel corresponding to the bevel in the stop layer.
    Type: Grant
    Filed: December 8, 2009
    Date of Patent: February 19, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Guanghong Luo, Danning Yang, Weimin Si, Dujiang Wan, Yun-Fei Li, Lijie Guan, Ming Jiang
  • Publication number: 20120304454
    Abstract: A process for fabricating a magnetic recording transducer for use in a data storage system comprises providing a substrate, an underlayer and a first nonmagnetic intermediate layer deposited to a first thickness on and in contact with the underlayer, performing a first scanning polishing on a first section of the first intermediate layer to planarize the first section of the first intermediate layer to a second thickness, providing a main pole in the planarized first section of the first intermediate layer, providing a first pattern of photoresist on and in contact with the first section of the first intermediate layer, the pattern comprising an aperture to define a side shield trench, performing a wet etch to remove at least a portion of the first intermediate layer thereby exposing at least one of the plurality of main pole sides, and depositing side shield material in the side shield trench.
    Type: Application
    Filed: June 6, 2011
    Publication date: December 6, 2012
    Applicant: WESTERN DIGITAL (FREMONT), LLC
    Inventors: MING JIANG, RONGHUI ZHOU, GUANGHONG LUO, MASAHIRO OSUGI, DANNING YANG
  • Patent number: 8262918
    Abstract: Methods of producing magnetic recording heads are disclosed. The methods can include providing a wafer comprising a substrate layer in which are disposed a plurality of damascene trenches. The method can further include depositing a pole material across the whole wafer, wherein the plurality of trenches are filled with the pole material. The methods can further include depositing a mask material over the pole material across the whole wafer. The methods can further include performing a first material removal process across the whole wafer to remove the mask material and a first portion of the pole material at a same material removal rate. The methods can further include performing a second material removal process to remove a second portion of the pole material above the substrate layer.
    Type: Grant
    Filed: March 25, 2009
    Date of Patent: September 11, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Yun-Fei Li, Ronghui Zhou, Guanghong Luo, Ming Jiang
  • Patent number: 8262919
    Abstract: A method and system for providing a pole of magnetic transducer having an intermediate layer are described. The method and system include providing a trench in the intermediate layer and depositing a nonmagnetic liner. A portion of the nonmagnetic liner resides in the trench. At least one seed layer is deposited. A portion of the at least one seed layer resides in the trench. The method and system include depositing at least one main pole layer. The at least one main pole layer is magnetic. A portion of the main pole layer(s) reside in the trench. The method and system also include performing a first chemical mechanical planarization (CMP). An excess portion of the seed layer(s) external to the trench are removed through an ion beam etch. The method and system further include performing a second CMP to remove an excess portion of the nonmagnetic liner external to the trench.
    Type: Grant
    Filed: June 25, 2010
    Date of Patent: September 11, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Guanghong Luo, Changqing Shi, Danning Yang, Jinwen Wang, Ming Jiang
  • Patent number: 8191237
    Abstract: A method for providing a structure in a magnetic transducer is described. The method includes performing a first planarization that exposes a top surface of the magnetic transducer. This first planarization also terminates before a portion of a first planarization buffer layer is removed. The method also includes providing a second planarization buffer layer after the first planarization is performed. The second planarization buffer layer is above the first planarization buffer layer. The method also includes performing a second planarization. This second planarization does not completely remove the second planarization buffer layer. The method also includes performing a third planarization terminating after the first planarization buffer layer is exposed and before the first planarization buffer layer is completely removed.
    Type: Grant
    Filed: May 21, 2009
    Date of Patent: June 5, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Guanghong Luo, Ge Yi, Dujiang Wan, Lei Wang, Xiaohai Xiang, Ming Jiang
  • Patent number: 8146236
    Abstract: A method and system for providing a perpendicular magnetic recording (PMR) transducer from pole layer(s) are disclosed. First and second planarization stop layers are provided on the pole layer(s). A mask is provided on the second planarization stop layer. A first portion of the mask resides on a portion of the pole layer(s) used to form the PMR pole. The PMR pole is defined after the mask is provided. An intermediate layer surrounding at least the PMR pole is provided. A first planarization is performed on at least the intermediate layer. A portion of the second planarization stop layer is removed during the first planarization. A remaining portion of the second planarization stop layer is removed. A second planarization is performed. A portion of the first planarization stop layer remains after the second planarization. A write gap and shield are provided on the PMR pole and write gap, respectively.
    Type: Grant
    Filed: March 28, 2008
    Date of Patent: April 3, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Guanghong Luo, Liubo Hong, Honglin Zhu, Yun-Fei Li, Yingjian Chen
  • Patent number: 8079135
    Abstract: A method for providing a perpendicular magnetic recording (PMR) transducer is described. The PMR transducer provided includes a PMR pole and yoke structure coupled with the PMR pole. The method includes providing a hard mask and an intermediate layer. A first portion of the hard mask resides on the PMR pole. A second portion of the hard mask resides on another structure. The intermediate layer surrounds at least the PMR pole. The method also includes performing a planarization on at least the intermediate layer, removing the first portion of the hard mask on the PMR pole without completely removing the second portion of the hard mask on the other structure. The method further includes removing a remaining portion of the hard mask on the other structure, providing a write gap on the PMR pole, and providing a shield on the write gap.
    Type: Grant
    Filed: December 13, 2007
    Date of Patent: December 20, 2011
    Assignee: Western Digital (Fremont), LLC
    Inventors: Yong Shen, Liubo Hong, Guanghong Luo, Honglin Zhu, Lei Wang, Yingjian Chen
  • Publication number: 20110042349
    Abstract: A method for forming a write pole comprises forming a stop layer over a substrate layer of a wafer, the stop layer having an opening above a damascene trench in the substrate layer, and forming a buffer layer over the stop layer, the buffer layer having an opening above the opening of the stop layer. The method further comprises plating a layer of magnetic material over the wafer, disposing a first sacrificial material over a region of the magnetic material above the damascene trench, performing a milling or etching operation over the wafer to remove the magnetic material not covered by the first sacrificial material and to remove the first sacrificial material, disposing a second sacrificial material over the wafer, and performing a polishing operation over the wafer to remove the region of the magnetic material above the damascene trench, the second sacrificial material, and the buffer layer.
    Type: Application
    Filed: August 20, 2009
    Publication date: February 24, 2011
    Applicant: Western Digital (Fremont), LLC
    Inventors: Ronghui ZHOU, Ming JIANG, Xiaohai XIANG, Jinwen WANG, Guanghong LUO, Yun-Fei LI