Abstract: A method for a laser-induced excitation of a radio frequency plasma at a low air pressure using a hardware device. The hardware device includes a pulsed laser source, a convex lens, a target material, an ion source system, and a radio frequency power supply system. When an air pressure value of the gas in the ion source system is lower than 1 Pa, and it's difficult to generate the radio frequency plasma, bombarding the target material in the ion source system by a pulsed laser beam; after the ion source system reaches a relatively high vacuum degree, providing gas to generate a plasma for the ion source system, providing the radio frequency electromagnetic field for the internal environment of the ion source system; outputting the high-intensity laser pulse; focusing the laser pulse to form a light spot with a high-power density.