Abstract: A CMOS-MEMS humidity sensor includes a complementary metal oxide semiconductor (CMOS) ASIC readout circuit and a microelectromechanical system (MEMS) humidity sensor. The MEMS humidity sensor is provided on the ASIC readout circuit. The ASIC readout circuit includes a substrate, a heating resistor layer located above the substrate, a metal layer located above the heating resistor layer, and dielectric layers. The substrate, the heating resistor layer, and the metal layer are partitioned by dielectric layers. The MEMS humidity sensor includes an aluminum electrode layer, a passivation layer located above the aluminum electrode layer, and a humidity sensitive layer located above the passivation layer. The provision of heating resistors in the ASIC circuit realizes the heating function and satisfies the requirements of the standard CMOS process, so that the CMOS-MEMS integrated humidity sensor can be used stably under low temperature and high humidity conditions.

Abstract: A drift-free humidity sensor and a calibration method thereof are provided. The drift-free humidity sensor includes a first humidity sensor unit and a second humidity sensor unit. The first humidity sensor unit includes a first measuring electrode, and a first humidity sensitive material is covered onto the first measuring electrode. The second humidity sensor unit includes a second measuring electrode, and a second humidity sensitive material is covered onto the second measuring electrode. The first humidity sensor unit and the second humidity sensor unit have different maximum humidity drifts. The drift-free humidity sensor effectively solves the drift problem of ordinary capacitive or resistive humidity sensors.

Abstract: A CMOS-MEMS humidity sensor, comprising: a complementary metal oxide semiconductor (CMOS) ASIC readout circuit and a microelectromechanical system (MEMS) humidity sensor. The MEMS humidity sensor is provided on the ASIC readout circuit. The ASIC readout circuit comprises: a substrate, a heating resistor layer, a metal layer, and dielectric layers, the heating resistor layer being located above the substrate, the metal layer being located above the heating resistor layer, and the substrate, the heating resistor layer, and the metal layer being partitioned by dielectric layers. The MEMS humidity sensor comprises: an aluminum electrode layer, a passivation layer, and a humidity sensitive layer, the passivation layer being located above the aluminum electrode layer, and the humidity sensitive layer being located above the passivation layer.

Abstract: A lens sealing sleeve includes a hollow cylindrical sleeve body used for a lens barrel to pass through and including a plurality of fold portions arranged along the axial direction, and two ends of the sleeve body are provided with a first opening and a second opening. The lens sealing sleeve also includes a first connection portion and a second connection portion. The first connection portion includes a first protrusion at least partially surrounding the first opening and correspondingly extending in a direction facing away from a central line of the first opening. The second connection portion includes a second protrusion at least partially surrounding the second opening and correspondingly extending in a direction facing away from a central line of the second opening. The first protrusion is provided with a first connection hole. The second protrusion is respectively provided with a second connection hole.

Abstract: A lens sealing sleeve includes a hollow cylindrical sleeve body used for a lens barrel to pass through and including a plurality of fold portions arranged along the axial direction, and two ends of the sleeve body are provided with a first opening and a second opening. The lens sealing sleeve also includes a first connection portion and a second connection portion. The first connection portion includes a first protrusion at least partially surrounding the first opening and correspondingly extending in a direction facing away from a central line of the first opening. The second connection portion includes a second protrusion at least partially surrounding the second opening and correspondingly extending in a direction facing away from a central line of the second opening. The first protrusion is provided with a first connection hole. The second protrusion is respectively provided with a second connection hole.