Patents by Inventor Guangli Che

Guangli Che has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for improving electroplating in sub-0.1um interconnects by adjusting immersion conditions
    Publication number: 20060006071
    Abstract: Embodiments of the invention provide methods of reducing electroplating defects by adjusting immersion conditions. For one embodiment, the immersion conditions are adjusted based upon characteristics of the substrate, including feature size. Additionally or alternatively, the immersion conditions may be adjusted based upon aspects of the electroplating process, including motion of the substrate upon immersion. Immersion conditions that may be adjusted in accordance with various embodiments of the invention include entry bias voltage/current, vertical immersion speed, and angle of immersion.
    Type: Application
    Filed: September 12, 2005
    Publication date: January 12, 2006
    Inventors: Guangli Che, Vinay Chikarmane, Christopher Thomas, Robert Wu, Daniel Zierath
  • Method for improving electroplating in sub-0.1um interconnects by adjusting immersion conditions
    Publication number: 20040245107
    Abstract: Embodiments of the invention provide methods of reducing electroplating defects by adjusting immersion conditions. For one embodiment, the immersion conditions are adjusted based upon characteristics of the substrate, including feature size. Additionally or alternatively, the immersion conditions may be adjusted based upon aspects of the electroplating process, including motion of the substrate upon immersion. Immersion conditions that may be adjusted in accordance with various embodiments of the invention include entry bias voltage/current, vertical immersion speed, and angle of immersion.
    Type: Application
    Filed: June 3, 2003
    Publication date: December 9, 2004
    Inventors: Guangli Che, Vinay B. Chikarmane, Christopher D. Thomas, Robert I. Wu, Daniel J. Zierath