Abstract: A system and method for preparing epoxy chloropropane is provided in that by coupling three stages of high gravity reactors, the product epoxy chloropropane and water vapor are distilled from a reaction system in form of an azeotrope by adopting a water vapor steam stripping method. Further, by combining the azeotrope with the multiples stages of high gravity reactors, the gas phase mass transfer and the liquid phase mass transfer of the azeotrope are improved aiming at the features of the azeotrope in the reaction system, thus making the overall conversion rate higher. In addition, by combining steam stripping and high gravity, dichloropropanol and alkali solution are rapidly mixed for mass transfer, and the product epoxy chloropropane is rapidly distilled from the reaction system in the form of the azeotrope, such that the reaction proceeds continuously towards the direction of producing epoxy chloropropane, thus significantly improving the conversion rate.

Abstract: Through the plasma spraying technology and the cold spraying high-speed deposition technology, an evenly distributed protective coating is formed on the surface of a plasma etching chamber. The protective coating, having a double-layer composite structure, includes a metal+Y2O3 coating as a metal+Y2O3 transition layer deposited by plasma spraying as a lower layer of the double-layer composite structure, and a high-purity Y2O3 ceramic coating coated on the metal+Y2O3 transition layer as an upper layer of the double-layer composite structure, the metal+Y2O3 transition layer is configured to reduce the difference in expansion coefficient between the Y2O3 ceramic coating and the metal substrate, and enhance the bonding force between the Y2O3 ceramic coating and the metal substrate; the high-purity Y2O3 ceramic coating is formed by depositing Y2O3 ceramic powders on the metal+Y2O3 transition layer at high speed through cold spraying high-speed deposition.

Abstract: A plasma arc-laser hybrid welding method for a high-sealing aluminum alloy thick plate rectangular chamber is provided. A length, height and width of the rectangular chamber of the high-sealing aluminum alloy thick plate are all ?350 mm. The aluminum alloy tensile plate material for the chamber is AL6061-T6, the plate thickness is 20 mm-25 mm, and the adjacent plates are in accordance with T The welding wire material is 4043, the diameter of the welding wire is ?1.2 mm, the height and width of the welding seam are required to be greater than 5 mm, the welding seam quality meets GB\12469-1990, and the ultimate vacuum degree of the chamber reaches 1 Pa. It greatly improves the material utilization rate and processing efficiency, and reduces the material and cycle cost. Using hybrid welding technology, compared with single laser welding and plasma welding, the welding quality is effectively improved.

Abstract: Through the plasma spraying technology and the cold spraying high-speed deposition technology, an evenly distributed protective coating is formed on the surface of a plasma etching chamber. The protective coating, having a double-layer composite structure, includes a metal+Y2O3 coating as a metal+Y2O3 transition layer deposited by plasma spraying as a lower layer of the double-layer composite structure, and a high-purity Y2O3 ceramic coating coated on the metal+Y2O3 transition layer as an upper layer of the double-layer composite structure, the metal+Y2O3 transition layer is configured to reduce the difference in expansion coefficient between the Y2O3 ceramic coating and the metal substrate, and enhance the bonding force between the Y2O3 ceramic coating and the metal substrate; the high-purity Y2O3 ceramic coating is formed by depositing Y2O3 ceramic powders on the metal+Y2O3 transition layer at high speed through cold spraying high-speed deposition.