Patents by Inventor Guangyu Huang

Guangyu Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11937423
    Abstract: A method used in forming a memory array, comprises forming a substrate comprising a conductive tier, an insulator etch-stop tier above the conductive tier, a select gate tier above the insulator etch-stop tier, and a stack comprising vertically-alternating insulative tiers and wordline tiers above the select gate tier. Etching is conducted through the insulative tiers, the wordline tiers, and the select gate tier to and stopping on the insulator etch-stop tier to form channel openings that have individual bottoms comprising the insulator etch-stop tier. The insulator etch-stop tier is penetrated through to extend individual of the channel openings there-through to the conductive tier. Channel material is formed in the individual channel openings elevationally along the insulative tiers, the wordline tiers, and the select gate tier and is directly electrically coupled with the conductive material in the conductive tier. Structure independent of method is disclosed.
    Type: Grant
    Filed: May 17, 2022
    Date of Patent: March 19, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Luan C. Tran, Guangyu Huang, Haitao Liu
  • Patent number: 11908948
    Abstract: A transistor comprises a lower contact structure, a channel structure, a dielectric fill structure, and an upper contact structure. The lower contact structure comprises a first oxide semiconductive material. The channel structure contacts the lower contact structure and comprises a second oxide semiconductive material having a smaller atomic concentration of one or more metals than the first oxide semiconductive material. The dielectric fill structure contacts an inner side surface of the channel structure and has a recessed upper surface relative to the channel structure. The upper contact structure comprises a third oxide semiconductive material having a greater atomic concentration of the one or more metals than the channel structure. The upper contact structure comprises a first portion contacting the upper surface of the dielectric fill structure and the inner side surface of the channel structure, and a second portion contacting the upper surface of the channel structure.
    Type: Grant
    Filed: August 22, 2022
    Date of Patent: February 20, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Guangyu Huang, Haitao Liu, Akira Goda
  • Publication number: 20230171962
    Abstract: Some embodiments include an integrated structure having vertically-stacked conductive levels. Upper conductive levels are memory cell levels, and a lower conductive level is a select device level. Conductively-doped semiconductor material is under the select device level. Channel material extends along the memory cell levels and the select device level, and extends into the conductively-doped semiconductor material. A region of the channel material that extends into the conductively-doped semiconductor material is a lower region of the channel material and has a vertical sidewall. Tunneling material, charge-storage material and charge-blocking material extend along the channel material and are between the channel material and the conductive levels. The tunneling material, charge-storage material and charge-blocking material are not along at least a portion of the vertical sidewall of the lower region of the channel material, and the conductively-doped semiconductor material is directly against such portion.
    Type: Application
    Filed: January 12, 2023
    Publication date: June 1, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Guangyu Huang, Haitao Liu, Chandra Mouli, Justin B. Dorhout, Sanh D. Tang, Akira Goda
  • Patent number: 11569266
    Abstract: Some embodiments include an integrated structure having vertically-stacked conductive levels. Upper conductive levels are memory cell levels, and a lower conductive level is a select device level. Conductively-doped semiconductor material is under the select device level. Channel material extends along the memory cell levels and the select device level, and extends into the conductively-doped semiconductor material. A region of the channel material that extends into the conductively-doped semiconductor material is a lower region of the channel material and has a vertical sidewall. Tunneling material, charge-storage material and charge-blocking material extend along the channel material and are between the channel material and the conductive levels. The tunneling material, charge-storage material and charge-blocking material are not along at least a portion of the vertical sidewall of the lower region of the channel material, and the conductively-doped semiconductor material is directly against such portion.
    Type: Grant
    Filed: May 5, 2021
    Date of Patent: January 31, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Guangyu Huang, Haitao Liu, Chandra Mouli, Justin B. Dorhout, Sanh D. Tang, Akira Goda
  • Publication number: 20220415908
    Abstract: Systems, apparatuses and methods may provide for memory cell technology comprising a control gate, a conductive channel, and a charge storage structure coupled to the control gate and the conductive channel, wherein the charge storage structure includes a polysilicon layer and a metal layer. In one example, the metal layer includes titanium nitride or other high effective work function metal.
    Type: Application
    Filed: July 14, 2021
    Publication date: December 29, 2022
    Inventors: Guangyu Huang, Dipanjan Basu, Meng-Wei Kuo, Randy Koval, Henok Mebrahtu, Minsheng Wang, Jie Li, Fei Wang, Qun Gao, Xingui Zhang, Guanjie Li
  • Publication number: 20220406941
    Abstract: A transistor comprises a lower contact structure, a channel structure, a dielectric fill structure, and an upper contact structure. The lower contact structure comprises a first oxide semiconductive material. The channel structure contacts the lower contact structure and comprises a second oxide semiconductive material having a smaller atomic concentration of one or more metals than the first oxide semiconductive material. The dielectric fill structure contacts an inner side surface of the channel structure and has a recessed upper surface relative to the channel structure. The upper contact structure comprises a third oxide semiconductive material having a greater atomic concentration of the one or more metals than the channel structure. The upper contact structure comprises a first portion contacting the upper surface of the dielectric fill structure and the inner side surface of the channel structure, and a second portion contacting the upper surface of the channel structure.
    Type: Application
    Filed: August 22, 2022
    Publication date: December 22, 2022
    Inventors: Kamal M. Karda, Guangyu Huang, Haitao Liu, Akira Goda
  • Patent number: 11527620
    Abstract: Some embodiments include an integrated assembly having a polycrystalline first semiconductor material, and having a second semiconductor material directly adjacent to the polycrystalline first semiconductor material. The second semiconductor material is of a different composition than the polycrystalline first semiconductor material. A conductivity-enhancing dopant is within the second semiconductor material. The conductivity-enhancing dopant is a neutral-type dopant relative to the polycrystalline first semiconductor material. An electrical gate is adjacent to a region of the polycrystalline first semiconductor material and is configured to induce an electric field within said region of the polycrystalline first semiconductor material. The gate is not adjacent to the second semiconductor material.
    Type: Grant
    Filed: May 11, 2021
    Date of Patent: December 13, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Deepak Chandra Pandey, Haitao Liu, Richard J. Hill, Guangyu Huang, Yunfei Gao, Ramanathan Gandhi, Scott E. Sills
  • Patent number: 11435325
    Abstract: The present invention belongs to the technical field of analysis and detection and provides a method for detecting a selenoamino acid in a selenoprotein. The detection method includes: (1): mixing 10-30 mg of a selenoprotein sample with hydrochloric acid, and hydrolyzing with microwaves at 140-170° C. for 10-40 min to obtain a hydrolysate; (2): adjusting pH of the hydrolysate to 6-8 to obtain a pretreated solution; and, (3): detecting a selenoamino acid in the pretreated solution with high performance liquid chromatography-hydride generation-atomic fluorescence spectrometry (HPLC-HG-AFS) to obtain a content of the selenoamino acid. The method is simple in operation and provides an accurate and reliable result, and also reduces time and cost.
    Type: Grant
    Filed: August 20, 2020
    Date of Patent: September 6, 2022
    Assignee: ENSHI TUJIA AND MEAO AUTONOMOUS PREFECTURE ACADEMY OF AGRILCULTURAL SCIENCE (ENSHI TUJIA AND MIAO AUTONOMOUS PREFECTURE SELENIUM APPLICATION TECHNOLOGY AND PRODUCT DEVELOPMENT INSTITUTE)
    Inventors: Yongbo Chen, Shuqin Liu, Chaoyang Zhang, Baishun Hu, Weidong Li, Guangyu Huang, E Chen, Bang Qin, Yong Qu
  • Publication number: 20220278120
    Abstract: A method used in forming a memory array, comprises forming a substrate comprising a conductive tier, an insulator etch-stop tier above the conductive tier, a select gate tier above the insulator etch-stop tier, and a stack comprising vertically-alternating insulative tiers and wordline tiers above the select gate tier. Etching is conducted through the insulative tiers, the wordline tiers, and the select gate tier to and stopping on the insulator etch-stop tier to form channel openings that have individual bottoms comprising the insulator etch-stop tier. The insulator etch-stop tier is penetrated through to extend individual of the channel openings there-through to the conductive tier. Channel material is formed in the individual channel openings elevationally along the insulative tiers, the wordline tiers, and the select gate tier and is directly electrically coupled with the conductive material in the conductive tier. Structure independent of method is disclosed.
    Type: Application
    Filed: May 17, 2022
    Publication date: September 1, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Luan C. Tran, Guangyu Huang, Haitao Liu
  • Patent number: 11430895
    Abstract: A transistor comprises a lower contact structure, a channel structure, a dielectric fill structure, and an upper contact structure. The lower contact structure comprises a first oxide semiconductive material. The channel structure contacts the lower contact structure and comprises a second oxide semiconductive material having a smaller atomic concentration of one or more metals than the first oxide semiconductive material. The dielectric fill structure contacts an inner side surface of the channel structure and has a recessed upper surface relative to the channel structure. The upper contact structure comprises a third oxide semiconductive material having a greater atomic concentration of the one or more metals than the channel structure. The upper contact structure comprises a first portion contacting the upper surface of the dielectric fill structure and the inner side surface of the channel structure, and a second portion contacting the upper surface of the channel structure.
    Type: Grant
    Filed: June 3, 2020
    Date of Patent: August 30, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Guangyu Huang, Haitao Liu, Akira Goda
  • Patent number: 11380699
    Abstract: A method used in forming a memory array, comprises forming a substrate comprising a conductive tier, an insulator etch-stop tier above the conductive tier, a select gate tier above the insulator etch-stop tier, and a stack comprising vertically-alternating insulative tiers and wordline tiers above the select gate tier. Etching is conducted through the insulative tiers, the wordline tiers, and the select gate tier to and stopping on the insulator etch-stop tier to form channel openings that have individual bottoms comprising the insulator etch-stop tier. The insulator etch-stop tier is penetrated through to extend individual of the channel openings there-through to the conductive tier. Channel material is formed in the individual channel openings elevationally along the insulative tiers, the wordline tiers, and the select gate tier and is directly electrically coupled with the conductive material in the conductive tier. Structure independent of method is disclosed.
    Type: Grant
    Filed: February 28, 2019
    Date of Patent: July 5, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Luan C. Tran, Guangyu Huang, Haitao Liu
  • Publication number: 20220189987
    Abstract: A vertical channel of a three-dimensional (3D) NAND has a recessed and filled drain/source pocket region for each memory cell to reduce resistance in a region that traditionally has high resistance. The vertical channel conducts current whose resistivity is controlled through a series of memory cells. The vertical channel can have a polysilicon material to conduct current past the memory cell gates and drain/sources region between the memory elements. The recess can extend the polysilicon away from a center of the vertical channel and closer to the control gates. The recess includes a structure to reduce resistance in the drain/source region along the vertical channel between memory cell gates.
    Type: Application
    Filed: December 16, 2020
    Publication date: June 16, 2022
    Inventors: Henok T. MEBRAHTU, Rahul AGARWAL, Randy J. KOVAL, Guangyu HUANG
  • Publication number: 20220181341
    Abstract: Apparatus having a transistor connected between a voltage node and a load node, where the transistor includes a dielectric material overlying a semiconductor material including fins and having a first conductivity type, a conductor overlying the dielectric material, first and second extension region bases formed in the semiconductor material and having a second conductivity type, first and second extension region risers formed overlying respective first and second extension region bases and having the second conductivity type, and first and second source/drain regions formed in respective first and second extension region risers and having the second conductivity type at greater conductivity levels than their respective extension region risers, as well as method of forming similar transistors.
    Type: Application
    Filed: December 3, 2020
    Publication date: June 9, 2022
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Haitao Liu, Michael Violette, Mark A. Helm, Guangyu Huang, Vladimir Mikhalev
  • Patent number: 11309321
    Abstract: Some embodiments include an integrated structure having a stack of alternating dielectric levels and conductive levels, and having vertically-stacked memory cells within the conductive levels. An opening extends through the stack. Channel material is within the opening and along the memory cells. At least some of the channel material contains germanium.
    Type: Grant
    Filed: November 30, 2020
    Date of Patent: April 19, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Haitao Liu, Chandra Mouli, Sergei Koveshnikov, Dimitrios Pavlopoulos, Guangyu Huang
  • Publication number: 20220084606
    Abstract: A method is described. The method includes programming a column of flash storage cells in a direction along the column in which a parasitic transistor that resides between a cell being programmed and an immediately next cell to be programmed has lower resistivity as compared to a corresponding parasitic transistor that exists if the programming were to be performed in an opposite direction along the column.
    Type: Application
    Filed: September 16, 2020
    Publication date: March 17, 2022
    Inventors: Xiang YANG, Guangyu HUANG, Narayanan RAMANAN, Pranav KALAVADE, Ali KHAKIFIROOZ
  • Publication number: 20210384354
    Abstract: A transistor comprises a lower contact structure, a channel structure, a dielectric fill structure, and an upper contact structure. The lower contact structure comprises a first oxide semiconductive material. The channel structure contacts the lower contact structure and comprises a second oxide semiconductive material having a smaller atomic concentration of one or more metals than the first oxide semiconductive material. The dielectric fill structure contacts an inner side surface of the channel structure and has a recessed upper surface relative to the channel structure. The upper contact structure comprises a third oxide semiconductive material having a greater atomic concentration of the one or more metals than the channel structure. The upper contact structure comprises a first portion contacting the upper surface of the dielectric fill structure and the inner side surface of the channel structure, and a second portion contacting the upper surface of the channel structure.
    Type: Application
    Filed: June 3, 2020
    Publication date: December 9, 2021
    Inventors: Kamal M. Karda, Guangyu Huang, Haitao Liu, Akira Goda
  • Publication number: 20210375925
    Abstract: Memory devices and electronic systems include an array of vertical memory cells positioned along respective vertical channels to define vertical memory strings. Each of the vertical channels includes a channel material exhibiting an electron mobility of at least about 30 cm2/(V·s) and a room temperature band gap of at least about 1.40 eV (e.g., zinc oxide, silicon carbide, indium phosphide, indium gallium zinc oxide, gallium arsenide, or molybdenum disulfide) and a bottom plug material exhibiting a room temperature band gap of less than about 1.10 eV (e.g., silicon germanium, germanium, or indium gallium arsenide). Methods of fabricating a memory device include forming such a bottom plug material within vertical channels and forming such a channel material electrically coupled to the bottom plug material.
    Type: Application
    Filed: August 16, 2021
    Publication date: December 2, 2021
    Inventors: Guangyu Huang, Haitao Liu, Chandra V. Mouli, Srinivas Pulugurtha
  • Patent number: 11107832
    Abstract: Memory devices and electronic systems include an array of vertical memory cells positioned along respective vertical channels to define vertical memory strings. Each of the vertical channels includes a channel material exhibiting an electron mobility of at least about 30 cm2/(V·s) and a room temperature band gap of at least about 1.40 eV (e.g., zinc oxide, silicon carbide, indium phosphide, indium gallium zinc oxide, gallium arsenide, or molybdenum disulfide) and a bottom plug material exhibiting a room temperature band gap of less than about 1.10 eV (e.g., silicon germanium, germanium, or indium gallium arsenide). Methods of fabricating a memory device include forming such a bottom plug material within vertical channels and forming such a channel material electrically coupled to the bottom plug material.
    Type: Grant
    Filed: March 18, 2020
    Date of Patent: August 31, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Guangyu Huang, Haitao Liu, Chandra V. Mouli, Srinivas Pulugurtha
  • Publication number: 20210265467
    Abstract: Some embodiments include an integrated assembly having a polycrystalline first semiconductor material, and having a second semiconductor material directly adjacent to the polycrystalline first semiconductor material. The second semiconductor material is of a different composition than the polycrystalline first semiconductor material. A conductivity-enhancing dopant is within the second semiconductor material. The conductivity-enhancing dopant is a neutral-type dopant relative to the polycrystalline first semiconductor material. An electrical gate is adjacent to a region of the polycrystalline first semiconductor material and is configured to induce an electric field within said region of the polycrystalline first semiconductor material. The gate is not adjacent to the second semiconductor material.
    Type: Application
    Filed: May 11, 2021
    Publication date: August 26, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Deepak Chandra Pandey, Haitao Liu, Richard J. Hill, Guangyu Huang, Yunfei Gao, Ramanathan Gandhi, Scott E. Sills
  • Publication number: 20210265499
    Abstract: A device includes a string driver comprising a channel region between a drain region and a source region. At least one of the channel region, the drain region, and the source region comprises a high band gap material. A gate region is adjacent and spaced from the high band gap material. The string driver is configured for high-voltage operation in association with an array of charge storage devices (e.g., 2D NAND or 3D NAND). Additional devices and systems (e.g., non-volatile memory systems) including the string drivers are disclosed, as are methods of forming the string drivers.
    Type: Application
    Filed: May 11, 2021
    Publication date: August 26, 2021
    Inventors: Haitao Liu, Guangyu Huang, Chandra V. Mouli, Akira Goda, Deepak Chandra Pandey, Kamal M. Karda