Patents by Inventor Gue-Hong Song

Gue-Hong Song has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • REFERENCE WAFER FOR CALIBRATION AND METHOD FOR FABRICATING THE SAME
    Publication number: 20120217219
    Abstract: A reference wafer maintains laser accuracy and calibrates a camera and a laser of a semiconductor equipment. The reference wafer includes a first anti-reflection layer, an adhesive layer, a light absorption layer and a second anti-reflection layer that are stacked over a substrate, a light reflection layer formed over the second anti-reflection layer, and a protection layer formed over the light reflection layer.
    Type: Application
    Filed: May 9, 2012
    Publication date: August 30, 2012
    Inventors: Hyun-Chul LEE, Jung-Taik Cheong, Gue-Hong Song, Ky-Hyun Han
  • Reference wafer for calibration and method for fabricating the same
    Patent number: 8198626
    Abstract: A reference wafer maintains laser accuracy and calibrates a camera and a laser of a semiconductor equipment. The reference wafer includes a first anti-reflection layer, an adhesive layer, a light absorption layer and a second anti-reflection layer that are stacked over a substrate, a light reflection layer formed over the second anti-reflection layer, and a protection layer formed over the light reflection layer.
    Type: Grant
    Filed: June 26, 2009
    Date of Patent: June 12, 2012
    Assignee: Hynix Semiconductor Inc.
    Inventors: Hyun-Chul Lee, Jung-Taik Cheong, Gue-Hong Song, Ky-Hyun Han
  • REFERENCE WAFER FOR CALIBRATION AND METHOD FOR FABRICATING THE SAME
    Publication number: 20100167064
    Abstract: A reference wafer maintains laser accuracy and calibrates a camera and a laser of a semiconductor equipment. The reference wafer includes a first anti-reflection layer, an adhesive layer, a light absorption layer and a second anti-reflection layer that are stacked over a substrate, a light reflection layer formed over the second anti-reflection layer, and a protection layer formed over the light reflection layer.
    Type: Application
    Filed: June 26, 2009
    Publication date: July 1, 2010
    Inventors: Hyun-Chul Lee, Jung-Taik Cheong, Gue-Hong Song, Ky-Hyun Han