Patents by Inventor Guen Bae

Guen Bae has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • GAS SEPARATION TYPE SHOWERHEAD
    Publication number: 20070163440
    Abstract: Provided is a gas separation type showerhead for effective energy supply. The gas separation type showerhead includes: a gas supply module to which a first gas and a second gas are separately supplied; a gas separation module in which the supplied first and second gases are separately dispersed; and a gas injection module which is a multi-hollow cathode having a plurality of holes and in which the first and second gases separately dispersed are ionized in the holes to be commonly dispersed.
    Type: Application
    Filed: January 19, 2007
    Publication date: July 19, 2007
    Applicant: ATTO CO., LTD.
    Inventors: Kyung Kim, Guen Bae, Ho Kim